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Title: Dual beam optical system for pulsed laser ablation film deposition

A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.
Inventors:
 [1]
  1. (Knoxville, TN)
Issue Date:
OSTI Identifier:
870610
Assignee:
Martin Marietta Energy Systems, Inc. (Oak Ridge, TN) ORNL
Patent Number(s):
US 5558788
Contract Number:
AC05-84OR21400
Research Org:
LOCKHEED MARTIN ENRGY SYST INC
Country of Publication:
United States
Language:
English
Subject:
dual; beam; optical; pulsed; laser; ablation; film; deposition; apparatus; source; outputting; chamber; sidewall; divider; dividing; substantially; equal; halves; pair; mirrors; converging; surface; target; complementary; angles; relative; normal; generating; plume; ablated; material; emanating; film deposition; pulsed laser; target surface; laser source; laser ablation; substantially equal; surface normal; beam divider; source output; ablation beam; ablation apparatus; dual beam; /219/

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