Dual beam optical system for pulsed laser ablation film deposition

Mashburn, Douglas N

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Title: Dual beam optical system for pulsed laser ablation film deposition

Abstract

A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.

Inventors:

Mashburn, Douglas N ^[1]

Knoxville, TN

Issue Date:: 1996-01-01

Research Org.:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

OSTI Identifier:: 870610

Patent Number(s):: 5558788

Assignee:: Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

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B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
B23K26/0608 - {in the same heat affected zone [HAZ]
B23K26/067 - Dividing the beam into multiple beams, e.g. multifocusing

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/28 - by wave energy or particle radiation

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DOE Contract Number:: AC05-84OR21400

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: dual; beam; optical; pulsed; laser; ablation; film; deposition; apparatus; source; outputting; chamber; sidewall; divider; dividing; substantially; equal; halves; pair; mirrors; converging; surface; target; complementary; angles; relative; normal; generating; plume; ablated; material; emanating; film deposition; pulsed laser; target surface; laser source; laser ablation; substantially equal; surface normal; beam divider; source output; ablation beam; ablation apparatus; dual beam; /219/

Citation Formats


                    Mashburn, Douglas N. Dual beam optical system for pulsed laser ablation film deposition.  United States: N. p., 1996. 
        Web.

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                    Mashburn, Douglas N. Dual beam optical system for pulsed laser ablation film deposition.  United States.

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                    Mashburn, Douglas N. Mon .  
        "Dual beam optical system for pulsed laser ablation film deposition".  United States.  https://www.osti.gov/servlets/purl/870610.

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@article{osti_870610,

  title        = {Dual beam optical system for pulsed laser ablation film deposition},

  author       = {Mashburn, Douglas N},

  abstractNote = {A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1996},

  month        = {1}

}

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Works referenced in this record:

Epitaxial growth of YBa ₂ Cu ₃ O _{7− x} thin films by a laser evaporation process
journal, October 1988

Roas, B.; Schultz, L.; Endres, G.
Applied Physics Letters, Vol. 53, Issue 16
https://doi.org/10.1063/1.100437

Characterization of ground‐state neutral and ion transport during laser ablation of Y ₁ Ba ₂ Cu ₃ O _{7− x} using transient optical absorption spectroscopy
journal, November 1989

Geohegan, D. B.; Mashburn, D. N.
Applied Physics Letters, Vol. 55, Issue 22
https://doi.org/10.1063/1.102362

Layered Growth Of HTSC Thin Films Using Pulsed Laser Deposition
conference, March 1990

Kawai, Tomoji; Kanai, Masaki; Tabata, Hitoshi
1989 Microelectronic Intergrated Processing Conferences, SPIE Proceedings
https://doi.org/10.1117/12.965151

Y‐Ba‐Cu‐O thin films grown on rigid and flexible polycrystalline yttria‐stabilized zirconia by pulsed laser ablation
journal, July 1990

Norton, David P.; Lowndes, Douglas H.; Budai, J. D.
Journal of Applied Physics, Vol. 68, Issue 1
https://doi.org/10.1063/1.347121

Pulsed laser deposition of thin superconducting films of Ho ₁ Ba ₂ Cu ₃ O ₇ − x and Y ₁ Ba ₂ Cu ₃ O _{7 − x}
journal, December 1988

Geohegan, D. B.; Mashburn, D. N.; Culbertson, R. J.
Journal of Materials Research, Vol. 3, Issue 6
https://doi.org/10.1557/JMR.1988.1169

Particulates reduction in laser‐ablated YBa ₂ Cu ₃ O _7−δ thin films by laser‐induced plume heating
journal, May 1990

Koren, G.; Baseman, R. J.; Gupta, A.
Applied Physics Letters, Vol. 56, Issue 21
https://doi.org/10.1063/1.103239

Physics Of In-Situ Laser Deposition Of Superconducting Thin Films
conference, March 1990

Kwok, H. S.; Shaw, D. T.; Ying, Q. Y.
1989 Microelectronic Intergrated Processing Conferences, SPIE Proceedings
https://doi.org/10.1117/12.965158

Characterization of Ground State Neutral and Ion Transport During Laser Ablation of 1:2:3 Superconductors by Transient Optical Absorption Spectroscopy
journal, January 1989

Geohegan, David B.; Mashburn, Douglas N.
MRS Proceedings, Vol. 169
https://doi.org/10.1557/PROC-169-501

Spectroscopic and Ion Probe Characterization of the Transport Process Following Laser Ablation of Yba ₂ Cu ₃ O _x
journal, January 1990

Geohegan, David B.; Mashburn, Douglas N.
MRS Proceedings, Vol. 191
https://doi.org/10.1557/PROC-191-211

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Similar Records

Title: Dual beam optical system for pulsed laser ablation film deposition

Abstract

Citation Formats

Epitaxial growth of YBa 2 Cu 3 O 7− x thin films by a laser evaporation process journal, October 1988

Characterization of ground‐state neutral and ion transport during laser ablation of Y 1 Ba 2 Cu 3 O 7− x using transient optical absorption spectroscopy journal, November 1989

Layered Growth Of HTSC Thin Films Using Pulsed Laser Deposition conference, March 1990

Y‐Ba‐Cu‐O thin films grown on rigid and flexible polycrystalline yttria‐stabilized zirconia by pulsed laser ablation journal, July 1990

Pulsed laser deposition of thin superconducting films of Ho 1 Ba 2 Cu 3 O 7 − x and Y 1 Ba 2 Cu 3 O 7 − x journal, December 1988

Particulates reduction in laser‐ablated YBa 2 Cu 3 O 7−δ thin films by laser‐induced plume heating journal, May 1990

Physics Of In-Situ Laser Deposition Of Superconducting Thin Films conference, March 1990

Characterization of Ground State Neutral and Ion Transport During Laser Ablation of 1:2:3 Superconductors by Transient Optical Absorption Spectroscopy journal, January 1989

Spectroscopic and Ion Probe Characterization of the Transport Process Following Laser Ablation of Yba 2 Cu 3 O x journal, January 1990

Epitaxial growth of YBa ₂ Cu ₃ O _{7− x} thin films by a laser evaporation process
journal, October 1988

Characterization of ground‐state neutral and ion transport during laser ablation of Y ₁ Ba ₂ Cu ₃ O _{7− x} using transient optical absorption spectroscopy
journal, November 1989

Layered Growth Of HTSC Thin Films Using Pulsed Laser Deposition
conference, March 1990

Y‐Ba‐Cu‐O thin films grown on rigid and flexible polycrystalline yttria‐stabilized zirconia by pulsed laser ablation
journal, July 1990

Pulsed laser deposition of thin superconducting films of Ho ₁ Ba ₂ Cu ₃ O ₇ − x and Y ₁ Ba ₂ Cu ₃ O _{7 − x}
journal, December 1988

Particulates reduction in laser‐ablated YBa ₂ Cu ₃ O _7−δ thin films by laser‐induced plume heating
journal, May 1990

Physics Of In-Situ Laser Deposition Of Superconducting Thin Films
conference, March 1990

Characterization of Ground State Neutral and Ion Transport During Laser Ablation of 1:2:3 Superconductors by Transient Optical Absorption Spectroscopy
journal, January 1989

Spectroscopic and Ion Probe Characterization of the Transport Process Following Laser Ablation of Yba ₂ Cu ₃ O _x
journal, January 1990