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Title: Dual beam optical system for pulsed laser ablation film deposition

Abstract

A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.

Inventors:
 [1]
  1. Knoxville, TN
Issue Date:
Research Org.:
LOCKHEED MARTIN ENRGY SYST INC
OSTI Identifier:
870610
Patent Number(s):
5558788
Assignee:
Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
dual; beam; optical; pulsed; laser; ablation; film; deposition; apparatus; source; outputting; chamber; sidewall; divider; dividing; substantially; equal; halves; pair; mirrors; converging; surface; target; complementary; angles; relative; normal; generating; plume; ablated; material; emanating; film deposition; pulsed laser; target surface; laser source; laser ablation; substantially equal; surface normal; beam divider; source output; ablation beam; ablation apparatus; dual beam; /219/

Citation Formats

Mashburn, Douglas N. Dual beam optical system for pulsed laser ablation film deposition. United States: N. p., 1996. Web.
Mashburn, Douglas N. Dual beam optical system for pulsed laser ablation film deposition. United States.
Mashburn, Douglas N. Mon . "Dual beam optical system for pulsed laser ablation film deposition". United States. https://www.osti.gov/servlets/purl/870610.
@article{osti_870610,
title = {Dual beam optical system for pulsed laser ablation film deposition},
author = {Mashburn, Douglas N},
abstractNote = {A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}

Patent:

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