Dual beam optical system for pulsed laser ablation film deposition
Abstract
A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.
- Inventors:
-
- Knoxville, TN
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 870610
- Patent Number(s):
- 5558788
- Assignee:
- Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- dual; beam; optical; pulsed; laser; ablation; film; deposition; apparatus; source; outputting; chamber; sidewall; divider; dividing; substantially; equal; halves; pair; mirrors; converging; surface; target; complementary; angles; relative; normal; generating; plume; ablated; material; emanating; film deposition; pulsed laser; target surface; laser source; laser ablation; substantially equal; surface normal; beam divider; source output; ablation beam; ablation apparatus; dual beam; /219/
Citation Formats
Mashburn, Douglas N. Dual beam optical system for pulsed laser ablation film deposition. United States: N. p., 1996.
Web.
Mashburn, Douglas N. Dual beam optical system for pulsed laser ablation film deposition. United States.
Mashburn, Douglas N. Mon .
"Dual beam optical system for pulsed laser ablation film deposition". United States. https://www.osti.gov/servlets/purl/870610.
@article{osti_870610,
title = {Dual beam optical system for pulsed laser ablation film deposition},
author = {Mashburn, Douglas N},
abstractNote = {A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 1996},
month = {Mon Jan 01 00:00:00 EST 1996}
}
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