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Title: Dual beam optical system for pulsed laser ablation film deposition

Abstract

A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.

Inventors:
 [1]
  1. Knoxville, TN
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
OSTI Identifier:
870610
Patent Number(s):
5558788
Assignee:
Martin Marietta Energy Systems, Inc. (Oak Ridge, TN)
Patent Classifications (CPCs):
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
dual; beam; optical; pulsed; laser; ablation; film; deposition; apparatus; source; outputting; chamber; sidewall; divider; dividing; substantially; equal; halves; pair; mirrors; converging; surface; target; complementary; angles; relative; normal; generating; plume; ablated; material; emanating; film deposition; pulsed laser; target surface; laser source; laser ablation; substantially equal; surface normal; beam divider; source output; ablation beam; ablation apparatus; dual beam; /219/

Citation Formats

Mashburn, Douglas N. Dual beam optical system for pulsed laser ablation film deposition. United States: N. p., 1996. Web.
Mashburn, Douglas N. Dual beam optical system for pulsed laser ablation film deposition. United States.
Mashburn, Douglas N. Mon . "Dual beam optical system for pulsed laser ablation film deposition". United States. https://www.osti.gov/servlets/purl/870610.
@article{osti_870610,
title = {Dual beam optical system for pulsed laser ablation film deposition},
author = {Mashburn, Douglas N},
abstractNote = {A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {1}
}

Works referenced in this record:

Epitaxial growth of YBa 2 Cu 3 O 7− x thin films by a laser evaporation process
journal, October 1988


Layered Growth Of HTSC Thin Films Using Pulsed Laser Deposition
conference, March 1990


Y‐Ba‐Cu‐O thin films grown on rigid and flexible polycrystalline yttria‐stabilized zirconia by pulsed laser ablation
journal, July 1990


Pulsed laser deposition of thin superconducting films of Ho 1 Ba 2 Cu 3 O 7x and Y 1 Ba 2 Cu 3 O 7 − x
journal, December 1988


Particulates reduction in laser‐ablated YBa 2 Cu 3 O 7−δ thin films by laser‐induced plume heating
journal, May 1990


Physics Of In-Situ Laser Deposition Of Superconducting Thin Films
conference, March 1990