Stabilizing laser energy density on a target during pulsed laser deposition of thin films
Abstract
A process for stabilizing laser energy density on a target surface during pulsed laser deposition of thin films controls the focused laser spot on the target. The process involves imaging an image-aperture positioned in the beamline. This eliminates changes in the beam dimensions of the laser. A continuously variable attenuator located in between the output of the laser and the imaged image-aperture adjusts the energy to a desired level by running the laser in a "constant voltage" mode. The process provides reproducibility and controllability for deposition of electronic thin films by pulsed laser deposition.
- Inventors:
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1255208
- Patent Number(s):
- 9353435
- Application Number:
- 14/042,167
- Assignee:
- Los Alamos National Security, LLC (Los Alamos, NM)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC52-06NA25396
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2013 Sep 30
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Citation Formats
Dowden, Paul C., and Jia, Quanxi. Stabilizing laser energy density on a target during pulsed laser deposition of thin films. United States: N. p., 2016.
Web.
Dowden, Paul C., & Jia, Quanxi. Stabilizing laser energy density on a target during pulsed laser deposition of thin films. United States.
Dowden, Paul C., and Jia, Quanxi. Tue .
"Stabilizing laser energy density on a target during pulsed laser deposition of thin films". United States. https://www.osti.gov/servlets/purl/1255208.
@article{osti_1255208,
title = {Stabilizing laser energy density on a target during pulsed laser deposition of thin films},
author = {Dowden, Paul C. and Jia, Quanxi},
abstractNote = {A process for stabilizing laser energy density on a target surface during pulsed laser deposition of thin films controls the focused laser spot on the target. The process involves imaging an image-aperture positioned in the beamline. This eliminates changes in the beam dimensions of the laser. A continuously variable attenuator located in between the output of the laser and the imaged image-aperture adjusts the energy to a desired level by running the laser in a "constant voltage" mode. The process provides reproducibility and controllability for deposition of electronic thin films by pulsed laser deposition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2016},
month = {5}
}
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