Stabilizing laser energy density on a target during pulsed laser deposition of thin films
Patent
·
OSTI ID:1255208
A process for stabilizing laser energy density on a target surface during pulsed laser deposition of thin films controls the focused laser spot on the target. The process involves imaging an image-aperture positioned in the beamline. This eliminates changes in the beam dimensions of the laser. A continuously variable attenuator located in between the output of the laser and the imaged image-aperture adjusts the energy to a desired level by running the laser in a "constant voltage" mode. The process provides reproducibility and controllability for deposition of electronic thin films by pulsed laser deposition.
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC52-06NA25396
- Assignee:
- Los Alamos National Security, LLC (Los Alamos, NM)
- Patent Number(s):
- 9,353,435
- Application Number:
- 14/042,167
- OSTI ID:
- 1255208
- Resource Relation:
- Patent File Date: 2013 Sep 30
- Country of Publication:
- United States
- Language:
- English
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