skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Dual beam optical system for pulsed laser ablation film deposition

Abstract

A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target. 3 figs.

Inventors:
Issue Date:
Research Org.:
Lockheed Martin Energy Syst Inc
OSTI Identifier:
378140
Patent Number(s):
5,558,788
Application Number:
PAN: 8-159,163
Assignee:
Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States)
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 24 Sep 1996
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; OPTICAL SYSTEMS; DESIGN; MATERIALS; PHYSICAL VAPOR DEPOSITION; LASER RADIATION

Citation Formats

Mashburn, D N. Dual beam optical system for pulsed laser ablation film deposition. United States: N. p., 1996. Web.
Mashburn, D N. Dual beam optical system for pulsed laser ablation film deposition. United States.
Mashburn, D N. Tue . "Dual beam optical system for pulsed laser ablation film deposition". United States.
@article{osti_378140,
title = {Dual beam optical system for pulsed laser ablation film deposition},
author = {Mashburn, D N},
abstractNote = {A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {9}
}