Dual beam optical system for pulsed laser ablation film deposition
Abstract
A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target. 3 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- OSTI Identifier:
- 378140
- Patent Number(s):
- 5558788
- Application Number:
- PAN: 8-159,163
- Assignee:
- Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States)
- DOE Contract Number:
- AC05-84OR21400
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 24 Sep 1996
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; OPTICAL SYSTEMS; DESIGN; MATERIALS; PHYSICAL VAPOR DEPOSITION; LASER RADIATION
Citation Formats
Mashburn, D N. Dual beam optical system for pulsed laser ablation film deposition. United States: N. p., 1996.
Web.
Mashburn, D N. Dual beam optical system for pulsed laser ablation film deposition. United States.
Mashburn, D N. Tue .
"Dual beam optical system for pulsed laser ablation film deposition". United States.
@article{osti_378140,
title = {Dual beam optical system for pulsed laser ablation film deposition},
author = {Mashburn, D N},
abstractNote = {A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target. 3 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {9}
}
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