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Title: Dual beam optical system for pulsed laser ablation film deposition

A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target. 3 figs.
Inventors:
Issue Date:
OSTI Identifier:
378140
Assignee:
Martin Marietta Energy Systems, Inc., Oak Ridge, TN (United States) PTO; SCA: 360101; 360201; 360601; PA: EDB-96:150460; SN: 96001666718
Patent Number(s):
US 5,558,788/A/
Application Number:
PAN: 8-159,163
Contract Number:
AC05-84OR21400
Resource Relation:
Other Information: PBD: 24 Sep 1996
Research Org:
Lockheed Martin Energy Syst Inc
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; OPTICAL SYSTEMS; DESIGN; MATERIALS; PHYSICAL VAPOR DEPOSITION; LASER RADIATION