Filtered cathodic arc deposition apparatus and method
Abstract
A filtered cathodic arc deposition method and apparatus for the production of highly dense, wear resistant coatings which are free from macro particles. The filtered cathodic arc deposition apparatus includes a cross shaped vacuum chamber which houses a cathode target having an evaporable surface comprised of the coating material, means for generating a stream of plasma, means for generating a transverse magnetic field, and a macro particle deflector. The transverse magnetic field bends the generated stream of plasma in the direction of a substrate. Macro particles are effectively filtered from the stream of plasma by traveling, unaffected by the transverse magnetic field, along the initial path of the plasma stream to a macro particle deflector. The macro particle deflector has a preformed surface which deflects macro particles away from the substrate.
- Inventors:
-
- 24461 W. Blvd. De John, Naperville, IL 60564
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- OSTI Identifier:
- 872279
- Patent Number(s):
- 5902462
- Assignee:
- Krauss; Alan R. (24461 W. Blvd. De John, Naperville, IL 60564)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- W-31109-ENG-38
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- filtered; cathodic; deposition; apparatus; method; production; highly; dense; wear; resistant; coatings; free; macro; particles; shaped; vacuum; chamber; houses; cathode; target; evaporable; surface; comprised; coating; material; means; generating; stream; plasma; transverse; magnetic; field; particle; deflector; bends; generated; direction; substrate; effectively; traveling; unaffected; initial; path; preformed; deflects; resistant coating; deposition method; coating material; vacuum chamber; magnetic field; transverse magnetic; resistant coatings; deposition apparatus; wear resistant; filtered cathodic; highly dense; /204/427/
Citation Formats
Krauss, Alan R. Filtered cathodic arc deposition apparatus and method. United States: N. p., 1999.
Web.
Krauss, Alan R. Filtered cathodic arc deposition apparatus and method. United States.
Krauss, Alan R. Fri .
"Filtered cathodic arc deposition apparatus and method". United States. https://www.osti.gov/servlets/purl/872279.
@article{osti_872279,
title = {Filtered cathodic arc deposition apparatus and method},
author = {Krauss, Alan R},
abstractNote = {A filtered cathodic arc deposition method and apparatus for the production of highly dense, wear resistant coatings which are free from macro particles. The filtered cathodic arc deposition apparatus includes a cross shaped vacuum chamber which houses a cathode target having an evaporable surface comprised of the coating material, means for generating a stream of plasma, means for generating a transverse magnetic field, and a macro particle deflector. The transverse magnetic field bends the generated stream of plasma in the direction of a substrate. Macro particles are effectively filtered from the stream of plasma by traveling, unaffected by the transverse magnetic field, along the initial path of the plasma stream to a macro particle deflector. The macro particle deflector has a preformed surface which deflects macro particles away from the substrate.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1999},
month = {Fri Jan 01 00:00:00 EST 1999}
}