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Title: Filtered cathodic arc source

Abstract

A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45.degree. to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.

Inventors:
 [1];  [1]
  1. (Livermore, CA)
Issue Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
OSTI Identifier:
869128
Patent Number(s):
5279723
Assignee:
as represented by United States Department of Energy (Washington, DC) LLNL
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
filtered; cathodic; source; continuous; coupled; macro-particle; filter; capable; separation; elimination; macro-particles; flux; produced; discharge; employs; axial; magnetic; field; cathode; target; tapered; confine; providing; material; utilization; bent; guide; metal; coated; consists; straight; solenoids; placed; 45; degree; prevents; line-of-sight; spot; provides; path; electrons; flow; series; baffles; trapping; axial magnetic; flux produced; magnetic field; target material; particle filter; filtered cathodic; source coupled; target mater; /204/250/313/427/

Citation Formats

Falabella, Steven, and Sanders, David M. Filtered cathodic arc source. United States: N. p., 1994. Web.
Falabella, Steven, & Sanders, David M. Filtered cathodic arc source. United States.
Falabella, Steven, and Sanders, David M. Sat . "Filtered cathodic arc source". United States. https://www.osti.gov/servlets/purl/869128.
@article{osti_869128,
title = {Filtered cathodic arc source},
author = {Falabella, Steven and Sanders, David M.},
abstractNote = {A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45.degree. to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

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