Filters for cathodic arc plasmas
Abstract
Cathodic arc plasmas are contaminated with macroparticles. A variety of magnetic plasma filters has been used with various success in removing the macroparticles from the plasma. An open-architecture, bent solenoid filter, with additional field coils at the filter entrance and exit, improves macroparticle filtering. In particular, a double-bent filter that is twisted out of plane forms a very compact and efficient filter. The coil turns further have a flat cross-section to promote macroparticle reflection out of the filter volume. An output conditioning system formed of an expander coil, a straightener coil, and a homogenizer, may be used with the magnetic filter for expanding the filtered plasma beam to cover a larger area of the target. A cathodic arc plasma deposition system using this filter can be used for the deposition of ultrathin amorphous hard carbon (a-C) films for the magnetic storage industry.
- Inventors:
-
- Albany, CA
- Richmond, CA
- Engadine, AU
- Berkeley, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- OSTI Identifier:
- 874808
- Patent Number(s):
- 6465780
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- filters; cathodic; plasmas; contaminated; macroparticles; variety; magnetic; plasma; success; removing; open-architecture; bent; solenoid; filter; additional; field; coils; entrance; exit; improves; macroparticle; filtering; double-bent; twisted; plane; forms; compact; efficient; coil; flat; cross-section; promote; reflection; volume; output; conditioning; formed; expander; straightener; homogenizer; expanding; filtered; beam; cover; larger; target; deposition; ultrathin; amorphous; hard; carbon; a-c; films; storage; industry; magnetic filter; /250/
Citation Formats
Anders, Andre, MacGill, Robert A, Bilek, Marcela M. M., and Brown, Ian G. Filters for cathodic arc plasmas. United States: N. p., 2002.
Web.
Anders, Andre, MacGill, Robert A, Bilek, Marcela M. M., & Brown, Ian G. Filters for cathodic arc plasmas. United States.
Anders, Andre, MacGill, Robert A, Bilek, Marcela M. M., and Brown, Ian G. Tue .
"Filters for cathodic arc plasmas". United States. https://www.osti.gov/servlets/purl/874808.
@article{osti_874808,
title = {Filters for cathodic arc plasmas},
author = {Anders, Andre and MacGill, Robert A and Bilek, Marcela M. M. and Brown, Ian G},
abstractNote = {Cathodic arc plasmas are contaminated with macroparticles. A variety of magnetic plasma filters has been used with various success in removing the macroparticles from the plasma. An open-architecture, bent solenoid filter, with additional field coils at the filter entrance and exit, improves macroparticle filtering. In particular, a double-bent filter that is twisted out of plane forms a very compact and efficient filter. The coil turns further have a flat cross-section to promote macroparticle reflection out of the filter volume. An output conditioning system formed of an expander coil, a straightener coil, and a homogenizer, may be used with the magnetic filter for expanding the filtered plasma beam to cover a larger area of the target. A cathodic arc plasma deposition system using this filter can be used for the deposition of ultrathin amorphous hard carbon (a-C) films for the magnetic storage industry.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 01 00:00:00 EST 2002},
month = {Tue Jan 01 00:00:00 EST 2002}
}