Filtered cathodic arc source
- Livermore, CA
A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45.degree. to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles.
- Research Organization:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- as represented by United States Department of Energy (Washington, DC)
- Patent Number(s):
- US 5279723
- OSTI ID:
- 869128
- Country of Publication:
- United States
- Language:
- English
Coating technology based on the vacuum arc-a review
|
journal | January 1990 |
Review of ion‐based coating processes derived from the cathodic arc
|
journal | May 1989 |
Comparison of two filtered cathodic arc sources
|
journal | March 1992 |
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Filtered cathodic arc source
A filtered cathodic arc deposition apparatus and method
Related Subjects
cathodic
source
continuous
coupled
macro-particle
filter
capable
separation
elimination
macro-particles
flux
produced
discharge
employs
axial
magnetic
field
cathode
target
tapered
confine
providing
material
utilization
bent
guide
metal
coated
consists
straight
solenoids
placed
45
degree
prevents
line-of-sight
spot
provides
path
electrons
flow
series
baffles
trapping
axial magnetic
flux produced
magnetic field
target material
particle filter
filtered cathodic
source coupled
target mater
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