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Title: Filters for blocking macroparticles in plasma deposition apparatus

This disclosure provides systems, methods, and apparatus related to blocking macroparticles in deposition processes utilizing plasmas. In one aspect, an apparatus includes a cathode, a substrate holder, a first magnet, a second magnet, and a structure. The cathode is configured to generate a plasma. The substrate holder is configured to hold a substrate. The first magnet is disposed proximate a first side of the cathode. The second magnet is disposed proximate a second side of the substrate holder. A magnetic field exists between the first magnet and the second magnet and a flow of the plasma substantially follows the magnetic field. The structure is disposed between the second side of the cathode and the first side of the substrate holder and is positioned proximate a region where the magnetic field between the first magnet and the second magnet is weak.
Inventors:
;
Issue Date:
OSTI Identifier:
1364598
Assignee:
The Regents of the University of California LBNL
Patent Number(s):
9,683,285
Application Number:
14/218,434
Contract Number:
AC02-05CH11231
Resource Relation:
Patent File Date: 2014 Mar 18
Research Org:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Other works cited in this record:

Arc plasma generator and a plasma arc apparatus for treating the surfaces of work-pieces, incorporating the same arc plasma generator
patent, June 1984

Arc source macroparticle filter
patent, July 1995

Rectangular vacuum-arc plasma source
patent, January 1996

Filters for cathodic arc plasmas
patent, October 2002

Plasma processing apparatus with real-time particle filter
patent, October 2003

Arrangement for the separation of particles from a plasma
patent-application, September 2007

Coated medical device and method of making
patent-application, January 2008

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