Laser interferometry force-feedback sensor for an interfacial force microscope
Abstract
A scanning force microscope is provided with a force-feedback sensor to increase sensitivity and stability in determining interfacial forces between a probe and a sample. The sensor utilizes an interferometry technique that uses a collimated light beam directed onto a deflecting member, comprising a common plate suspended above capacitor electrodes situated on a substrate forming an interference cavity with a probe on the side of the common plate opposite the side suspended above capacitor electrodes. The probe interacts with the surface of the sample and the intensity of the reflected beam is measured and used to determine the change in displacement of the probe to the sample and to control the probe distance relative to the surface of the sample.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174803
- Patent Number(s):
- 6718821
- Application Number:
- 10/010,095
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Houston, Jack E., and Smith, William L. Laser interferometry force-feedback sensor for an interfacial force microscope. United States: N. p., 2004.
Web.
Houston, Jack E., & Smith, William L. Laser interferometry force-feedback sensor for an interfacial force microscope. United States.
Houston, Jack E., and Smith, William L. Tue .
"Laser interferometry force-feedback sensor for an interfacial force microscope". United States. https://www.osti.gov/servlets/purl/1174803.
@article{osti_1174803,
title = {Laser interferometry force-feedback sensor for an interfacial force microscope},
author = {Houston, Jack E. and Smith, William L.},
abstractNote = {A scanning force microscope is provided with a force-feedback sensor to increase sensitivity and stability in determining interfacial forces between a probe and a sample. The sensor utilizes an interferometry technique that uses a collimated light beam directed onto a deflecting member, comprising a common plate suspended above capacitor electrodes situated on a substrate forming an interference cavity with a probe on the side of the common plate opposite the side suspended above capacitor electrodes. The probe interacts with the surface of the sample and the intensity of the reflected beam is measured and used to determine the change in displacement of the probe to the sample and to control the probe distance relative to the surface of the sample.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 13 00:00:00 EDT 2004},
month = {Tue Apr 13 00:00:00 EDT 2004}
}
Works referenced in this record:
A new force sensor incorporating force‐feedback control for interfacial force microscopy
journal, March 1991
- Joyce, Stephen A.; Houston, J. E.
- Review of Scientific Instruments, Vol. 62, Issue 3