Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors
Patent
·
OSTI ID:1576365
A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Board of Regents, The University of Texas System (Austin, TX); National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- Patent Number(s):
- 10,392,243
- Application Number:
- 15/516,322
- OSTI ID:
- 1576365
- Resource Relation:
- Patent File Date: 2015 Oct 01
- Country of Publication:
- United States
- Language:
- English
Similar Records
MEMS closed-loop control incorporating a memristor as feedback sensing element
Behavioral Features of MIS Memristors with a Si{sub 3}N{sub 4} Nanolayer Fabricated on a Conductive Si Substrate
Emergency capacitive energy source and circuit for damper motors and actuator motors
Journal Article
·
Tue Dec 01 00:00:00 EST 2015
· IEEE Transactions on Circuits and Systems. II, Express Briefs
·
OSTI ID:1576365
+1 more
Behavioral Features of MIS Memristors with a Si{sub 3}N{sub 4} Nanolayer Fabricated on a Conductive Si Substrate
Journal Article
·
Sat Dec 15 00:00:00 EST 2018
· Semiconductors
·
OSTI ID:1576365
+5 more
Emergency capacitive energy source and circuit for damper motors and actuator motors
Patent
·
Tue Jan 11 00:00:00 EST 1994
·
OSTI ID:1576365
+1 more