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Title: Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors

Abstract

A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.

Inventors:
; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1576365
Patent Number(s):
10392243
Application Number:
15/516,322
Assignee:
Board of Regents, The University of Texas System (Austin, TX); National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Resource Relation:
Patent File Date: 2015 Oct 01
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., and Mireles, Jr., Jose G. Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors. United States: N. p., 2019. Web.
Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., & Mireles, Jr., Jose G. Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors. United States.
Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., and Mireles, Jr., Jose G. Tue . "Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors". United States. https://www.osti.gov/servlets/purl/1576365.
@article{osti_1576365,
title = {Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors},
author = {Almeida Loya, Sergio Fabian and Zubia, David and Garcia, Ernest J. and Mireles, Jr., Jose G.},
abstractNote = {A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {8}
}

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