Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors
Abstract
A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1576365
- Patent Number(s):
- 10392243
- Application Number:
- 15/516,322
- Assignee:
- Board of Regents, The University of Texas System (Austin, TX); National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2015 Oct 01
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., and Mireles, Jr., Jose G. Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors. United States: N. p., 2019.
Web.
Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., & Mireles, Jr., Jose G. Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors. United States.
Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., and Mireles, Jr., Jose G. Tue .
"Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors". United States. https://www.osti.gov/servlets/purl/1576365.
@article{osti_1576365,
title = {Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors},
author = {Almeida Loya, Sergio Fabian and Zubia, David and Garcia, Ernest J. and Mireles, Jr., Jose G.},
abstractNote = {A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2019},
month = {8}
}
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