Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors

Title: Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors

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Abstract

A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.

Inventors:: Almeida Loya, Sergio Fabian; Zubia, David; Garcia, Ernest J.; Mireles, Jr., Jose G.

Issue Date:: 2019-08-27

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1576365

Patent Number(s):: 10392243

Application Number:: 15/516,322

Assignee:: Board of Regents, The University of Texas System (Austin, TX); National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B7/0087 - {On-device systems and sensors for controlling, regulating or monitoring}
B81B2201/0242 - Gyroscopes
B81B7/008 - {MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
B81B2201/0235 - Accelerometers
B81B7/02 - containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]

G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK
G01P15/125 - by capacitive pick-up

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 2015 Oct 01

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., and Mireles, Jr., Jose G. Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors.  United States: N. p., 2019. 
        Web.

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                    Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., & Mireles, Jr., Jose G. Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors.  United States.

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                    Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., and Mireles, Jr., Jose G. Tue .  
        "Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors".  United States.  https://www.osti.gov/servlets/purl/1576365.

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@article{osti_1576365,

  title        = {Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors},

  author       = {Almeida Loya, Sergio Fabian and Zubia, David and Garcia, Ernest J. and Mireles, Jr., Jose G.},

  abstractNote = {A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {8}

}

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