Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors

Almeida Loya, Sergio Fabian; Zubia, David; Garcia, Ernest J.; Mireles, Jose G.

Title: Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors

Abstract

A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.

Inventors:: Almeida Loya, Sergio Fabian; Zubia, David; Garcia, Ernest J.; Mireles, Jr., Jose G.

Issue Date:: 2019-08-27

Research Org.:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1576365

Patent Number(s):: 10392243

Application Number:: 15/516,322

Assignee:: Board of Regents, The University of Texas System (Austin, TX); National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B2201/0242 - Gyroscopes
B81B7/0087 - {On-device systems and sensors for controlling, regulating or monitoring}
B81B7/008 - {MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
B81B2201/0235 - Accelerometers
B81B7/02 - containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]

G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK
G01P15/125 - by capacitive pick-up

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Resource Relation:: Patent File Date: 2015 Oct 01

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., and Mireles, Jr., Jose G. Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors.  United States: N. p., 2019. 
        Web.

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                    Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., & Mireles, Jr., Jose G. Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors.  United States.

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                    Almeida Loya, Sergio Fabian, Zubia, David, Garcia, Ernest J., and Mireles, Jr., Jose G. Tue .  
        "Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors".  United States.  https://www.osti.gov/servlets/purl/1576365.

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@article{osti_1576365,

  title        = {Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors},

  author       = {Almeida Loya, Sergio Fabian and Zubia, David and Garcia, Ernest J. and Mireles, Jr., Jose G.},

  abstractNote = {A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2019},

  month        = {8}

}

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Works referenced in this record:

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Wang, Xiaobin; Chen, Yiran; Wang, Alan
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Similar Records

Title: Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors

Abstract

Citation Formats

Magnetic tunnel junction and memristor apparatus patent, March 2011

Method for forming memristor material and electrode structure with memristance patent, December 2010

Reconfigurable memristor-based computing logic patent, April 2013

Semiconductor memristor devices patent, May 2013

Memristor crossbar neural interface patent, March 2011

Method of implementing memristor-based multilevel memory using reference resistor array patent, April 2013

Self-reconfigurable memristor-based analog resonant computer patent, September 2012

Methods and systems for three-memristor synapse with STDP and dopamine signaling patent, April 2013

Memristor having a triangular shaped electrode patent, April 2013

Method and apparatus for modeling memristor devices patent, August 2012

Memristor with nanostructure electrodes patent, May 2013

Magnetic tunnel junction and memristor apparatus
patent, March 2011

Method for forming memristor material and electrode structure with memristance
patent, December 2010

Reconfigurable memristor-based computing logic
patent, April 2013

Semiconductor memristor devices
patent, May 2013

Memristor crossbar neural interface
patent, March 2011

Method of implementing memristor-based multilevel memory using reference resistor array
patent, April 2013

Self-reconfigurable memristor-based analog resonant computer
patent, September 2012

Methods and systems for three-memristor synapse with STDP and dopamine signaling
patent, April 2013

Memristor having a triangular shaped electrode
patent, April 2013

Method and apparatus for modeling memristor devices
patent, August 2012

Memristor with nanostructure electrodes
patent, May 2013