Micromachined force-balance feedback accelerometer with optical displacement detection
Abstract
An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1149912
- Patent Number(s):
- 8,783,106
- Application Number:
- 13/324,012
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Dec 13
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Nielson, Gregory N., Langlois, Eric, Baker, Michael, Okandan, Murat, and Anderson, Robert. Micromachined force-balance feedback accelerometer with optical displacement detection. United States: N. p., 2014.
Web.
Nielson, Gregory N., Langlois, Eric, Baker, Michael, Okandan, Murat, & Anderson, Robert. Micromachined force-balance feedback accelerometer with optical displacement detection. United States.
Nielson, Gregory N., Langlois, Eric, Baker, Michael, Okandan, Murat, and Anderson, Robert. Tue .
"Micromachined force-balance feedback accelerometer with optical displacement detection". United States. https://www.osti.gov/servlets/purl/1149912.
@article{osti_1149912,
title = {Micromachined force-balance feedback accelerometer with optical displacement detection},
author = {Nielson, Gregory N. and Langlois, Eric and Baker, Michael and Okandan, Murat and Anderson, Robert},
abstractNote = {An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {7}
}
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Works referenced in this record:
Efficient semiconductor light-emitting device and method
patent, February 1996
- Choquette, Kent; Lear, Kevin; Schneider, Richard
- US Patent Document 5,493,577
Optical device with low electrical and thermal resistance bragg reflectors
patent, October 1996
- Lear, Kevin
- US Patent Document 5,568,499
Tuned optical cavity magnetometer
patent, November 2010
- Okandan, Murat; Schwindt, Peter
- US Patent Document 7,826,065
Microelectromechanical inertial sensor
patent, June 2012
- Okandan, Murat; Nielson, Gregory
- US Patent Document 8,205,497
Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation
journal, February 2008
- Hall, N. A.; Okandan, M.; Littrell, R.
- Journal of Microelectromechanical Systems, Vol. 17, Issue 1
Micromachined optical microphone structures with low thermal-mechanical noise levels
journal, October 2007
- Hall, Neal A.; Okandan, Murat; Littrell, Robert
- The Journal of the Acoustical Society of America, Vol. 122, Issue 4
In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor
journal, July 2008
- Krishnamoorthy, U.; Olsson, R. H.; Bogart, G. R.
- Sensors and Actuators A: Physical, Vol. 145-146, p. 283-290