Micromachined force-balance feedback accelerometer with optical displacement detection
Abstract
An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1149912
- Patent Number(s):
- 8783106
- Application Number:
- 13/324,012
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01P - MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Dec 13
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Nielson, Gregory N., Langlois, Eric, Baker, Michael, Okandan, Murat, and Anderson, Robert. Micromachined force-balance feedback accelerometer with optical displacement detection. United States: N. p., 2014.
Web.
Nielson, Gregory N., Langlois, Eric, Baker, Michael, Okandan, Murat, & Anderson, Robert. Micromachined force-balance feedback accelerometer with optical displacement detection. United States.
Nielson, Gregory N., Langlois, Eric, Baker, Michael, Okandan, Murat, and Anderson, Robert. Tue .
"Micromachined force-balance feedback accelerometer with optical displacement detection". United States. https://www.osti.gov/servlets/purl/1149912.
@article{osti_1149912,
title = {Micromachined force-balance feedback accelerometer with optical displacement detection},
author = {Nielson, Gregory N. and Langlois, Eric and Baker, Michael and Okandan, Murat and Anderson, Robert},
abstractNote = {An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2014},
month = {7}
}
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Works referencing / citing this record:
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