Electrostatic MEMS devices with high reliability
Abstract
The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of Wisconsin, Madison, WI (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1170735
- Patent Number(s):
- 8963659
- Application Number:
- 13/114,945
- Assignee:
- Goldsmith,Charles L. (Plano, TX)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01H - ELECTRIC SWITCHES
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03K - PULSE TECHNIQUE
- DOE Contract Number:
- FG02-02ER46016
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 May 24
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Goldsmith, Charles L, Auciello, Orlando H, Sumant, Anirudha V, Mancini, Derrick C, Gudeman, Chris, Sampath, Suresh, Carlilse, John A, Carpick, Robert W, and Hwang, James. Electrostatic MEMS devices with high reliability. United States: N. p., 2015.
Web.
Goldsmith, Charles L, Auciello, Orlando H, Sumant, Anirudha V, Mancini, Derrick C, Gudeman, Chris, Sampath, Suresh, Carlilse, John A, Carpick, Robert W, & Hwang, James. Electrostatic MEMS devices with high reliability. United States.
Goldsmith, Charles L, Auciello, Orlando H, Sumant, Anirudha V, Mancini, Derrick C, Gudeman, Chris, Sampath, Suresh, Carlilse, John A, Carpick, Robert W, and Hwang, James. Tue .
"Electrostatic MEMS devices with high reliability". United States. https://www.osti.gov/servlets/purl/1170735.
@article{osti_1170735,
title = {Electrostatic MEMS devices with high reliability},
author = {Goldsmith, Charles L and Auciello, Orlando H and Sumant, Anirudha V and Mancini, Derrick C and Gudeman, Chris and Sampath, Suresh and Carlilse, John A and Carpick, Robert W and Hwang, James},
abstractNote = {The present invention provides for an electrostatic microelectromechanical (MEMS) device comprising a dielectric layer separating a first conductor and a second conductor. The first conductor is moveable towards the second conductor, when a voltage is applied to the MEMS device. The dielectric layer recovers from dielectric charging failure almost immediately upon removal of the voltage from the MEMS device.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 24 00:00:00 EST 2015},
month = {Tue Feb 24 00:00:00 EST 2015}
}
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