Position sensing circuit for an electrostatically driven MEMS device

Panas, Robert Matthew; Corral, Princess; Hunter, Steven L.; Paul, Phillip Harris

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Title: Position sensing circuit for an electrostatically driven MEMS device

Abstract

The present disclosure relates to a system for detecting movement of a microelectromechanical system (MEMS) device. The system uses a drive voltage signal source for generating a low frequency drive voltage signal for driving the MEMS device. An excitation signal source may be used for generating an excitation signal which is also applied to the MEMS device. The excitation signal has a frequency which is above a physical response capability of the MEMS device, such that operation of the MEMS device is not significantly affected by the excitation signal. A sensing impedance is used to help generate a signal which is responsive to the capacitance of the MEMS device. The capacitance of the MEMS device changes in response to movement of the MEMS device. An output subsystem is provided which responds to changes sensed by the sensing impedance, and which produces an output voltage signal. A filter filters the output voltage signal to produce a filtered output voltage signal. The filtered output voltage signal is indicative of a position of the MEMS device.

Inventors:: Panas, Robert Matthew; Corral, Princess; Hunter, Steven L.; Paul, Phillip Harris

Issue Date:: 2023-11-21

Research Org.:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 2293877

Patent Number(s):: 11820649

Application Number:: 17/187,206

Assignee:: Lawrence Livermore National Security, LLC (Livermore, CA)

DOE Contract Number:: AC52-07NA27344

Resource Type:: Patent

Resource Relation:: Patent File Date: 02/26/2021

Country of Publication:: United States

Language:: English

Citation Formats


                    Panas, Robert Matthew, Corral, Princess, Hunter, Steven L., and Paul, Phillip Harris. Position sensing circuit for an electrostatically driven MEMS device.  United States: N. p., 2023. 
        Web.

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                    Panas, Robert Matthew, Corral, Princess, Hunter, Steven L., & Paul, Phillip Harris. Position sensing circuit for an electrostatically driven MEMS device.  United States.

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                    Panas, Robert Matthew, Corral, Princess, Hunter, Steven L., and Paul, Phillip Harris. Tue .  
        "Position sensing circuit for an electrostatically driven MEMS device".  United States.  https://www.osti.gov/servlets/purl/2293877.

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@article{osti_2293877,

  title        = {Position sensing circuit for an electrostatically driven MEMS device},

  author       = {Panas, Robert Matthew and Corral, Princess and Hunter, Steven L. and Paul, Phillip Harris},

  abstractNote = {The present disclosure relates to a system for detecting movement of a microelectromechanical system (MEMS) device. The system uses a drive voltage signal source for generating a low frequency drive voltage signal for driving the MEMS device. An excitation signal source may be used for generating an excitation signal which is also applied to the MEMS device. The excitation signal has a frequency which is above a physical response capability of the MEMS device, such that operation of the MEMS device is not significantly affected by the excitation signal. A sensing impedance is used to help generate a signal which is responsive to the capacitance of the MEMS device. The capacitance of the MEMS device changes in response to movement of the MEMS device. An output subsystem is provided which responds to changes sensed by the sensing impedance, and which produces an output voltage signal. A filter filters the output voltage signal to produce a filtered output voltage signal. The filtered output voltage signal is indicative of a position of the MEMS device.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2023},

  month        = {11}

}

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Works referenced in this record:

Sensor device with reduced parasitic-induced error
patent, January 2012

Bien, David E.; Mijuskovic, Dejan
US Patent Document 8,096,179
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8096179

Auto-focus camera module with MEMS capacitance estimator
patent, October 2016

McKinley, David
US Patent Document 9,477,139
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9477139

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display
journal, February 2015

Hung, Andrew C. -L.; Lai, Harrison Y. -H.; Lin, Ta-Wei
Sensors and Actuators A: Physical, Vol. 222
https://doi.org/10.1016/j.sna.2014.10.008

Self test of MEMS gyroscope with ASICs integrated capacitors
patent, June 2015

Opris, Ion; Seng, Justin
US Patent Document 9,069,006
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9069006

Detecting responses of micro-electromechanical system (MEMS) resonator device
patent, February 2015

Tanbakuchi, Hassan; Legrand, Bernard; Ducatteau, Damien
US Patent Document 8,952,891
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8952891

Microelectromechanical system for measuring angular rate
patent, January 2003

McCall, Hiram; Lin, Ching-Fang
US Patent Document 6,508,122
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6508122

MEMS capacitive pressure sensor, operating method and manufacturing method
patent, July 2016

Besling, Willem Frederik Adrianus; Reimann, Klaus; Steeneken, Peter Gerard
US Patent Document 9,383,282
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9383282

MEMS driver
patent, May 2017

Gutierrez, Roman C.; Wang, Hongyu
US Patent Document 9,641,103
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9641103

Pressure sensor, acoustic microphone, blood pressure sensor, and touch panel
patent, March 2017

Fuji, Yoshihiko; Masunishi, Kei; Fukuzawa, Hideaki
US Patent Document 9,596,995
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9596995

Electrostatic MEMS driver with on-chip capacitance measurement for autofocus applications
patent, May 2012

Alini, Roberto; Casiraghi, Roberto
US Patent Document 8,188,755
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8188755

Calibration of micro-mirror arrays
patent, December 2015

Jayapala, Murali; Van der Plas, Geert; Rochus, Veronique
US Patent Document 9,201,241
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9201241

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Title: Position sensing circuit for an electrostatically driven MEMS device

Abstract

Citation Formats

Sensor device with reduced parasitic-induced error patent, January 2012

Auto-focus camera module with MEMS capacitance estimator patent, October 2016

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display journal, February 2015

Self test of MEMS gyroscope with ASICs integrated capacitors patent, June 2015

Detecting responses of micro-electromechanical system (MEMS) resonator device patent, February 2015

Microelectromechanical system for measuring angular rate patent, January 2003

MEMS capacitive pressure sensor, operating method and manufacturing method patent, July 2016

MEMS driver patent, May 2017

Pressure sensor, acoustic microphone, blood pressure sensor, and touch panel patent, March 2017

Electrostatic MEMS driver with on-chip capacitance measurement for autofocus applications patent, May 2012

Calibration of micro-mirror arrays patent, December 2015

Sensor device with reduced parasitic-induced error
patent, January 2012

Auto-focus camera module with MEMS capacitance estimator
patent, October 2016

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display
journal, February 2015

Self test of MEMS gyroscope with ASICs integrated capacitors
patent, June 2015

Detecting responses of micro-electromechanical system (MEMS) resonator device
patent, February 2015

Microelectromechanical system for measuring angular rate
patent, January 2003

MEMS capacitive pressure sensor, operating method and manufacturing method
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patent, May 2017

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patent, March 2017

Electrostatic MEMS driver with on-chip capacitance measurement for autofocus applications
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