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Title: Active mechanical-environmental-thermal MEMS device for nanoscale characterization

Abstract

A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1650859
Patent Number(s):
10641733
Application Number:
15/925,118
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
DOE Contract Number:  
NA0003525
Resource Type:
Patent
Resource Relation:
Patent File Date: 03/19/2018
Country of Publication:
United States
Language:
English

Citation Formats

Jungjohann, Katherine L., Mook, William, Chisholm, Claire, Shaw, Michael, Hattar, Khalid Mikhiel, Galambos, Paul C., Leenheer, Andrew Jay, and Hearne, Sean J.. Active mechanical-environmental-thermal MEMS device for nanoscale characterization. United States: N. p., 2020. Web.
Jungjohann, Katherine L., Mook, William, Chisholm, Claire, Shaw, Michael, Hattar, Khalid Mikhiel, Galambos, Paul C., Leenheer, Andrew Jay, & Hearne, Sean J.. Active mechanical-environmental-thermal MEMS device for nanoscale characterization. United States.
Jungjohann, Katherine L., Mook, William, Chisholm, Claire, Shaw, Michael, Hattar, Khalid Mikhiel, Galambos, Paul C., Leenheer, Andrew Jay, and Hearne, Sean J.. Tue . "Active mechanical-environmental-thermal MEMS device for nanoscale characterization". United States. https://www.osti.gov/servlets/purl/1650859.
@article{osti_1650859,
title = {Active mechanical-environmental-thermal MEMS device for nanoscale characterization},
author = {Jungjohann, Katherine L. and Mook, William and Chisholm, Claire and Shaw, Michael and Hattar, Khalid Mikhiel and Galambos, Paul C. and Leenheer, Andrew Jay and Hearne, Sean J.},
abstractNote = {A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2020},
month = {5}
}

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Works referenced in this record:

Microanalytical device and use thereof for conducting chemical processes
patent, October 2003


Control valve utilizing mechanical beam buckling
patent, September 1991


Surface-micromachined microfluidic devices
patent, September 2004


Sample preparation, processing and analysis systems
patent, January 2020


Microfluidic devices and methods of use
patent, August 2007