Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers

Golovchenko, Jene A.; King, Gavin M.; Schurmann, Gregor M.; Branton, Daniel

Title: Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers

Patent · Tue Aug 09 00:00:00 EDT 2011

OSTI ID:1531690

Golovchenko, Jene A.; King, Gavin M.; Schurmann, Gregor M.; Branton, Daniel

The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.

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Research Organization:: Harvard Univ., Cambridge, MA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: F-49620-01-1-0467; FG02-01ER45922

Assignee:: President and Fellows of Harvard College (Cambridge, MA)

Patent Number(s):: 7,993,538

Application Number:: 12/287,573

OSTI ID:: 1531690

Resource Relation:: Patent File Date: 2008-10-10

Country of Publication:: United States

Language:: English

References (21)

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Cited By (4)

Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers Branton, Daniel; Golovchenko, Jene A.; King, Gavin M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8221595 US Patent Document 8,221,595	patent	July 2012
Nanotube processing employing solid-condensed-gas-layers Golovchenko, Jene A.; King, Gavin M.; Schurmann, Gregor M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8273257 US Patent Document 8,273,257	patent	September 2012
Electron beam processing with condensed ice Branton, Daniel; Han, Anpan; Golovchenko, Jene A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8790863 US Patent Document 8,790,863	patent	July 2014
Joule heated nanowire biosensors Kuypers, Frans A. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8314357 US Patent Document 8,314,357	patent	November 2012

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