Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers

Golovchenko, Jene A.; King, Gavin M.; Schrmann, Gregor M.; Branton, Daniel

Title: Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers

Patent · Tue Oct 14 00:00:00 EDT 2008

OSTI ID:1531567

Golovchenko, Jene A.; King, Gavin M.; Schrmann, Gregor M.; Branton, Daniel

The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.

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Research Organization:: Harvard Univ., Cambridge, MA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-01ER45922

Assignee:: President and Fellows of Harvard College (Cambridge, MA)

Patent Number(s):: 7,435,353

Application Number:: 11/008,402

OSTI ID:: 1531567

Resource Relation:: Patent File Date: 2004-12-09

Country of Publication:: United States

Language:: English

References (14)

Amorphous Water Angell, C. Austen Annual Review of Physical Chemistry, Vol. 55, Issue 1 https://doi.org/10.1146/annurev.physchem.55.091602.094156	journal	June 2004
Process for fabricating cryogenic targets and targets made thereby Whitlock, Robert R. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4535023 US Patent Document 4,535,023	patent	August 1985
Three dimensional imaging system Wohlstadter, Jacob N. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6014259 US Patent Document 6,014,259	patent	January 2000
"Sputtering" of Ice by MeV Light Ions Brown, W. L.; Lanzerotti, L. J.; Poate, J. M. Physical Review Letters, Vol. 40, Issue 15 https://doi.org/10.1103/PhysRevLett.40.1027	journal	April 1978
Linear and Nonlinear Processes in the Erosion of $H_{2}$ O Ice by Fast Light Ions Brown, W. L.; Augustyniak, W. M.; Lanzerotti, L. J. Physical Review Letters, Vol. 45, Issue 20 https://doi.org/10.1103/PhysRevLett.45.1632	journal	November 1980
Dry process for the production of microelectronic devices Okumura, Koji; Saeva, Franklin D. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4348473 US Patent Document 4,348,473	patent	September 1982
Methods for modifying surfaces Koberstein, Jeffrey T.; Wang, Peng; Pan, Feng https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20070134420 US Patent Application 11/454652; 20070134420	patent-application	June 2007
Nanometer Patterning with Ice King, Gavin M.; Schürmann, Gregor; Branton, Daniel Nano Letters, Vol. 5, Issue 6 https://doi.org/10.1021/nl050405n	journal	June 2005
Supercooled and glassy water Debenedetti, Pablo G. Journal of Physics: Condensed Matter, Vol. 15, Issue 45 https://doi.org/10.1088/0953-8984/15/45/R01	journal	October 2003
Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface Koops, Hans; Edinger, Klaus https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7238294 US Patent Document 7,238,294	patent	July 2007
Sublimation of vapor-deposited water ice below 170 K, and its dependence on growth conditions Sack, N. J.; Baragiola, R. A. Physical Review B, Vol. 48, Issue 14 https://doi.org/10.1103/PhysRevB.48.9973	journal	October 1993
On the mechanism of formation of amorphous condensates from the vapour phase (I). General theory Gutzov, I.; Avramov, I. Journal of Non-Crystalline Solids, Vol. 16, Issue 1 https://doi.org/10.1016/0022-3093(74)90075-1	journal	October 1974
Dependence of the dissolution characteristics of As2S3 as a photoresist on the condensation rate and evaporation temperature Mednikarov, B. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 7, Issue 3 https://doi.org/10.1116/1.584785	journal	May 1989
Thickness dependent crystallization kinetics of sub-micron amorphous solid water films Safarik, D. J.; Meyer, R. J.; Mullins, C. B. The Journal of Chemical Physics, Vol. 118, Issue 10 https://doi.org/10.1063/1.1543980	journal	March 2003

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Nanotube processing employing solid-condensed-gas-layers Golovchenko, Jene A.; King, Gavin M.; Schurmann, Gregor M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8273257 US Patent Document 8,273,257	patent	September 2012
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