Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers

Golovchenko, Jene A.; King, Gavin M.; Schrmann, Gregor M.; Branton, Daniel

Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers

Patent · Tue Oct 14 04:00:00 EDT 2008

OSTI ID:1531567

Golovchenko, Jene A.; King, Gavin M.; Schrmann, Gregor M.; Branton, Daniel

The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.

Research Organization:: Harvard College, Cambridge, MA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-01ER45922

Assignee:: President and Fellows of Harvard College (Cambridge, MA)

Patent Number(s):: 7,435,353

Application Number:: 11/008,402

OSTI ID:: 1531567

Country of Publication:: United States

Language:: English

References (9)

On the mechanism of formation of amorphous condensates from the vapour phase (I). General theory Gutzov, I.; Avramov, I. Journal of Non-Crystalline Solids, Vol. 16, Issue 1 https://doi.org/10.1016/0022-3093(74)90075-1	journal	October 1974
Sublimation of vapor-deposited water ice below 170 K, and its dependence on growth conditions Sack, N. J.; Baragiola, R. A. Physical Review B, Vol. 48, Issue 14 https://doi.org/10.1103/PhysRevB.48.9973	journal	October 1993
Nanometer Patterning with Ice King, Gavin M.; Schürmann, Gregor; Branton, Daniel Nano Letters, Vol. 5, Issue 6 https://doi.org/10.1021/nl050405n	journal	June 2005
Amorphous Water Angell, C. Austen Annual Review of Physical Chemistry, Vol. 55, Issue 1 https://doi.org/10.1146/annurev.physchem.55.091602.094156	journal	June 2004
Supercooled and glassy water Debenedetti, Pablo G. Journal of Physics: Condensed Matter, Vol. 15, Issue 45 https://doi.org/10.1088/0953-8984/15/45/R01	journal	October 2003
Linear and Nonlinear Processes in the Erosion of H 2 O Ice by Fast Light Ions Brown, W. L.; Augustyniak, W. M.; Lanzerotti, L. J. Physical Review Letters, Vol. 45, Issue 20 https://doi.org/10.1103/PhysRevLett.45.1632	journal	November 1980
"Sputtering" of Ice by MeV Light Ions Brown, W. L.; Lanzerotti, L. J.; Poate, J. M. Physical Review Letters, Vol. 40, Issue 15 https://doi.org/10.1103/PhysRevLett.40.1027	journal	April 1978
Dependence of the dissolution characteristics of As2S3 as a photoresist on the condensation rate and evaporation temperature Mednikarov, B. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 7, Issue 3 https://doi.org/10.1116/1.584785	journal	May 1989
Thickness dependent crystallization kinetics of sub-micron amorphous solid water films Safarik, D. J.; Meyer, R. J.; Mullins, C. B. The Journal of Chemical Physics, Vol. 118, Issue 10 https://doi.org/10.1063/1.1543980	journal	March 2003

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