Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
Abstract
The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.
- Inventors:
- Publication Date:
- Research Org.:
- Harvard Univ., Cambridge, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531690
- Patent Number(s):
- 7,993,538
- Application Number:
- 12/287,573
- Assignee:
- President and Fellows of Harvard College (Cambridge, MA)
- DOE Contract Number:
- F-49620-01-1-0467; FG02-01ER45922
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2008-10-10
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Golovchenko, Jene A., King, Gavin M., Schurmann, Gregor M., and Branton, Daniel. Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers. United States: N. p., 2011.
Web.
Golovchenko, Jene A., King, Gavin M., Schurmann, Gregor M., & Branton, Daniel. Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers. United States.
Golovchenko, Jene A., King, Gavin M., Schurmann, Gregor M., and Branton, Daniel. Tue .
"Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers". United States. https://www.osti.gov/servlets/purl/1531690.
@article{osti_1531690,
title = {Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers},
author = {Golovchenko, Jene A. and King, Gavin M. and Schurmann, Gregor M. and Branton, Daniel},
abstractNote = {The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.},
doi = {},
url = {https://www.osti.gov/biblio/1531690},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {8}
}
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