High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers
Abstract
In this Letter, we have developed new and highly efficient periodic multilayer mirrors Al/Sc, Al/Sc/SiC, and Mo/Al/Sc with optimized reflectance at wavelengths between 40 and 65 nm. We have reached record values in measured peak reflectance: 57.5% at 44.7 nm and 46.5% at 51 nm, with Al/Sc/SiC at near-normal incidence. Furthermore, to the best of our knowledge, we have achieved the largest reported bandwidth with Mo/Al/Sc at 57 nm and the narrowest bandwidth with Al/Sc at a 60 nm wavelength. These new and promising results demonstrate that Al/Sc-based multilayer coatings are excellent candidates for future generations of extreme ultraviolet (EUV) instruments for solar physics, EUV lasers, and attosecond science, in a wavelength range that has not been fully explored.
- Authors:
-
- Univ. Paris-Saclay, Palaiseau Cedex (France); Centre National d-Etudes Spatiales, Toulouse (France)
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Univ. Paris-Saclay, Palaiseau Cedex (France)
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1881607
- Alternate Identifier(s):
- OSTI ID: 1598368
- Report Number(s):
- LLNL-JRNL-799367
Journal ID: ISSN 0146-9592; 1002139
- Grant/Contract Number:
- AC52-07NA27344; Professional Research and Teaching Leave; AC03-76F00098
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Optics Letters
- Additional Journal Information:
- Journal Volume: 45; Journal Issue: 4; Journal ID: ISSN 0146-9592
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. United States: N. p., 2020.
Web. doi:10.1364/ol.384734.
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, & Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. United States. https://doi.org/10.1364/ol.384734
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. Mon .
"High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers". United States. https://doi.org/10.1364/ol.384734. https://www.osti.gov/servlets/purl/1881607.
@article{osti_1881607,
title = {High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers},
author = {Rebellato, Jennifer and Soufli, Regina and Meltchakov, Evgueni and Gullikson, Eric and de Rossi, Sébastien and Delmotte, Franck},
abstractNote = {In this Letter, we have developed new and highly efficient periodic multilayer mirrors Al/Sc, Al/Sc/SiC, and Mo/Al/Sc with optimized reflectance at wavelengths between 40 and 65 nm. We have reached record values in measured peak reflectance: 57.5% at 44.7 nm and 46.5% at 51 nm, with Al/Sc/SiC at near-normal incidence. Furthermore, to the best of our knowledge, we have achieved the largest reported bandwidth with Mo/Al/Sc at 57 nm and the narrowest bandwidth with Al/Sc at a 60 nm wavelength. These new and promising results demonstrate that Al/Sc-based multilayer coatings are excellent candidates for future generations of extreme ultraviolet (EUV) instruments for solar physics, EUV lasers, and attosecond science, in a wavelength range that has not been fully explored.},
doi = {10.1364/ol.384734},
journal = {Optics Letters},
number = 4,
volume = 45,
place = {United States},
year = {Mon Feb 10 00:00:00 EST 2020},
month = {Mon Feb 10 00:00:00 EST 2020}
}
Web of Science
Works referenced in this record:
Extreme Ultraviolet Multilayer Nanostructures and Their Application to Solar Plasma Observations: A Review
journal, January 2019
- Corso, Alain J.; Pelizzo, Maria G.
- Journal of Nanoscience and Nanotechnology, Vol. 19, Issue 1
Stable Multilayer Reflective Coatings for λ(HeI) = 58.4 nm for the KORTES Solar Telescope
journal, February 2019
- Polkovnikov, V. N.; Chkhalo, N. I.; Meltchakov, E.
- Technical Physics Letters, Vol. 45, Issue 2
Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
journal, January 2012
- Fernández-Perea, Mónica; Soufli, Regina; Robinson, Jeff C.
- Optics Express, Vol. 20, Issue 21
Normal-incidence silicon–gadolinium multilayers for imaging at 63 nm wavelength
journal, January 2008
- Kjornrattanawanich, Benjawan; Windt, David L.; Seely, John F.
- Optics Letters, Vol. 33, Issue 9
Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light
journal, January 2009
- Aquila, A.; Salmassi, F.; Liu, Yanwei
- Optics Express, Vol. 17, Issue 24
Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings
journal, July 2012
- Soufli, Regina; Fernández-Perea, Mónica; Baker, Sherry L.
- Applied Physics Letters, Vol. 101, Issue 4
SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging
journal, January 2006
- Kjornrattanawanich, Benjawan; Windt, David L.; Seely, John F.
- Applied Optics, Vol. 45, Issue 8
Multilayer optics for coherent EUV/X-ray laser sources
conference, September 2015
- Delmotte, F.; Dehlinger, M.; Bourassin-Bouchet, Ch.
- SPIE Optical Engineering + Applications, SPIE Proceedings
Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm
journal, January 2005
- Gautier, Julien; Delmotte, Franck; Roulliay, Marc
- Applied Optics, Vol. 44, Issue 3
Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium
journal, January 2004
- Uspenskii, Yu. A.; Seely, John F.; Popov, N. L.
- Journal of the Optical Society of America A, Vol. 21, Issue 2
Amorphous silicon carbide coatings for extreme ultraviolet optics
journal, January 1988
- Kortright, J. B.; Windt, David L.
- Applied Optics, Vol. 27, Issue 14
Development of Al-based multilayer optics for EUV
journal, October 2009
- Meltchakov, E.; Hecquet, C.; Roulliay, M.
- Applied Physics A, Vol. 98, Issue 1
Single and multi-channel Al-based multilayer systems for space applications in EUV range
conference, May 2013
- Meltchakov, E.; De Rossi, S.; Mercier, R.
- SPIE Optics + Optoelectronics, SPIE Proceedings
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993
- Henke, B. L.; Gullikson, E. M.; Davis, J. C.
- Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342
High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
journal, May 1998
- Underwood, J. H.; Gullikson, E. M.
- Journal of Electron Spectroscopy and Related Phenomena, Vol. 92, Issue 1-3
Recent developments in EUV reflectometry at the Advanced Light Source
conference, August 2001
- Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B.
- 26th Annual International Symposium on Microlithography, SPIE Proceedings
IMD—Software for modeling the optical properties of multilayer films
journal, January 1998
- Windt, David L.
- Computers in Physics, Vol. 12, Issue 4
Enhanced reflectivity and stability of Sc/Si multilayers
conference, January 2004
- Yulin, Sergiy A.; Schaefers, Franz; Feigl, Torsten
- Optical Science and Technology, SPIE's 48th Annual Meeting, SPIE Proceedings