Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
Abstract
We have developed new, corrosion-resistant Mg/SiC multilayer coatings which can be used to efficiently and simultaneously reflect extreme ultraviolet (EUV) radiation in single or multiple narrow bands centered at wavelengths in the spectral region from 25 to 80 nm. Corrosion mitigation is achieved through the use of partially amorphous Al-Mg thin layers. Three different multilayer design concepts were developed and deposited by magnetron sputtering and the reflectance was measured at near-normal incidence in a broad spectral range. Unprotected Mg/SiC multilayers were also deposited and measured for comparison. They were shown to efficiently reflect radiation at a wavelength of 76.9 nm with a peak reflectance of 40.6% at near-normal incidence, the highest experimental reflectance reported at this wavelength for a narrowband coating. The demonstration of multilayer coatings with corrosion resistance and multiplewavelength EUV performance is of great interest in the development of mirrors for space-borne solar physics telescopes and other applications requiring long-lasting coatings with narrowband response in multiple emission lines across the EUV range.
- Authors:
-
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Consejo Superior de Investigaciones Cientificas (CSIC), Madrid (Spain), Instituto de Optica
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (USA); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1266671
- Report Number(s):
- LLNL-JRNL-574772
Journal ID: ISSN 1094-4087; OPEXFF
- Grant/Contract Number:
- AC52-07NA27344; AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Optics Express
- Additional Journal Information:
- Journal Volume: 20; Journal Issue: 21; Journal ID: ISSN 1094-4087
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Citation Formats
Fernández-Perea, Mónica, Soufli, Regina, Robinson, Jeff C., De Marcos, Luis RodrÃguez, Méndez, Jose A., Larruquert, Juan I., and Gullikson, Eric M. Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region. United States: N. p., 2012.
Web. doi:10.1364/OE.20.024018.
Fernández-Perea, Mónica, Soufli, Regina, Robinson, Jeff C., De Marcos, Luis RodrÃguez, Méndez, Jose A., Larruquert, Juan I., & Gullikson, Eric M. Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region. United States. https://doi.org/10.1364/OE.20.024018
Fernández-Perea, Mónica, Soufli, Regina, Robinson, Jeff C., De Marcos, Luis RodrÃguez, Méndez, Jose A., Larruquert, Juan I., and Gullikson, Eric M. Sun .
"Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region". United States. https://doi.org/10.1364/OE.20.024018. https://www.osti.gov/servlets/purl/1266671.
@article{osti_1266671,
title = {Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region},
author = {Fernández-Perea, Mónica and Soufli, Regina and Robinson, Jeff C. and De Marcos, Luis RodrÃguez and Méndez, Jose A. and Larruquert, Juan I. and Gullikson, Eric M.},
abstractNote = {We have developed new, corrosion-resistant Mg/SiC multilayer coatings which can be used to efficiently and simultaneously reflect extreme ultraviolet (EUV) radiation in single or multiple narrow bands centered at wavelengths in the spectral region from 25 to 80 nm. Corrosion mitigation is achieved through the use of partially amorphous Al-Mg thin layers. Three different multilayer design concepts were developed and deposited by magnetron sputtering and the reflectance was measured at near-normal incidence in a broad spectral range. Unprotected Mg/SiC multilayers were also deposited and measured for comparison. They were shown to efficiently reflect radiation at a wavelength of 76.9 nm with a peak reflectance of 40.6% at near-normal incidence, the highest experimental reflectance reported at this wavelength for a narrowband coating. The demonstration of multilayer coatings with corrosion resistance and multiplewavelength EUV performance is of great interest in the development of mirrors for space-borne solar physics telescopes and other applications requiring long-lasting coatings with narrowband response in multiple emission lines across the EUV range.},
doi = {10.1364/OE.20.024018},
journal = {Optics Express},
number = 21,
volume = 20,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 2012},
month = {Sun Jan 01 00:00:00 EST 2012}
}
Web of Science
Works referenced in this record:
Reflectance measurements on clean surfaces for the determination of optical constants of silicon in the extreme ultraviolet–soft-x-ray region
journal, January 1997
- Soufli, Regina; Gullikson, Eric M.
- Applied Optics, Vol. 36, Issue 22
Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings
journal, July 2012
- Soufli, Regina; Fernández-Perea, Mónica; Baker, Sherry L.
- Applied Physics Letters, Vol. 101, Issue 4
Extreme ultraviolet photoionization of aldoses and ketoses
journal, April 2011
- Shin, Joong-Won; Dong, Feng; Grisham, Michael E.
- Chemical Physics Letters, Vol. 506, Issue 4-6
Initial Calibration of the Atmospheric Imaging Assembly (AIA) on the Solar Dynamics Observatory (SDO)
journal, July 2011
- Boerner, Paul; Edwards, Christopher; Lemen, James
- Solar Physics, Vol. 275, Issue 1-2
Amorphous silicon carbide coatings for extreme ultraviolet optics
journal, January 1988
- Kortright, J. B.; Windt, David L.
- Applied Optics, Vol. 27, Issue 14
Sub-diffraction-limited multilayer coatings for the 03 numerical aperture micro-exposure tool for extreme ultraviolet lithography
journal, January 2007
- Soufli, Regina; Hudyma, Russell M.; Spiller, Eberhard
- Applied Optics, Vol. 46, Issue 18
Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range
journal, September 2010
- Vidal-Dasilva, Manuela; Aquila, Andrew L.; Gullikson, Eric M.
- Journal of Applied Physics, Vol. 108, Issue 6
High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
journal, May 1998
- Underwood, J. H.; Gullikson, E. M.
- Journal of Electron Spectroscopy and Related Phenomena, Vol. 92, Issue 1-3
Measurement of zone plate efficiencies in the extreme ultraviolet and applications to radiation monitors for absolute spectral emission
conference, August 2006
- Seely, John; Holland, Glenn; Bremer, James C.
- SPIE Optics + Photonics, SPIE Proceedings
Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity
journal, January 2009
- Hecquet, Christophe; Delmotte, Franck; Ravet-Krill, Marie-Françoise
- Applied Physics A, Vol. 95, Issue 2
Soft X-ray Images of the Solar Corona with a Normal-Incidence Cassegrain Multilayer Telescope
journal, September 1988
- Walker, A. B. C.; Lindblom, J. F.; Barbee, T. W.
- Science, Vol. 241, Issue 4874
IMD—Software for modeling the optical properties of multilayer films
journal, January 1998
- Windt, David L.
- Computers in Physics, Vol. 12, Issue 4
Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution
journal, January 2008
- Brewer, Courtney A.; Brizuela, Fernando; Wachulak, Przemyslaw
- Optics Letters, Vol. 33, Issue 5
Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm
journal, January 2009
- Vidal-Dasilva, Manuela; Fernández-Perea, Mónica; Méndez, José A.
- Optics Express, Vol. 17, Issue 25
Long-term stability of multilayers
journal, February 2012
- Pelizzo, Maria Guglielmina
- Optical Engineering, Vol. 51, Issue 2
Two-Color Reflection Multilayers for He-I and He-II Resonance Lines for Microscopic Ultraviolet Photoelectron Spectroscopy Using Schwarzschild Objective
journal, January 2001
- Ejima, Takeo; Kondo, Yuzi; Watanabe, Makoto
- Japanese Journal of Applied Physics, Vol. 40, Issue Part 1, No. 1
Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications
journal, January 2009
- Windt, David L.; Bellotti, Jeffrey A.
- Applied Optics, Vol. 48, Issue 26
Recent developments in EUV reflectometry at the Advanced Light Source
conference, August 2001
- Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B.
- 26th Annual International Symposium on Microlithography, SPIE Proceedings
Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser
journal, January 1999
- Artioukov, I. A.; Benware, B. R.; Rocca, J. J.
- IEEE Journal of Selected Topics in Quantum Electronics, Vol. 5, Issue 6
Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory
conference, August 2005
- Soufli, Regina; Windt, David L.; Robinson, Jeff C.
- Optics & Photonics 2005, SPIE Proceedings
The Tension of Metallic Films Deposited by Electrolysis
journal, May 1909
- Stoney, G. G.
- Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 82, Issue 553
Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer
journal, June 2005
- Takenaka, Hisataka; Ichimaru, Satoshi; Ohchi, Tadayuki
- Journal of Electron Spectroscopy and Related Phenomena, Vol. 144-147
Comparison of Mg-based multilayers for solar He II radiation at 304 nm wavelength
journal, January 2010
- Zhu, Jingtao; Zhou, Sika; Li, Haochuan
- Applied Optics, Vol. 49, Issue 20
Determination of optical constants of scandium films in the 20-1000 eV range
journal, January 2006
- Fernández-Perea, Mónica; Larruquert, Juan I.; Aznárez, José A.
- Journal of the Optical Society of America A, Vol. 23, Issue 11
Demonstration of a desk-top size high repetition rate soft x-ray laser
journal, January 2005
- Heinbuch, S.; Grisham, M.; Martz, D.
- Optics Express, Vol. 13, Issue 11
Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings
journal, January 2000
- Filevich, J.; Kanizay, K.; Marconi, M. C.
- Optics Letters, Vol. 25, Issue 5
Characterization of diffraction gratings by use of a tabletop soft-x-ray laser
journal, January 2001
- Seminario, Max; Rocca, Jorge J.; Depine, Ricardo A.
- Applied Optics, Vol. 40, Issue 30
Terbium-based extreme ultraviolet multilayers
journal, January 2005
- Windt, David L.; Seely, John F.; Kjornrattanawanich, Benjawan
- Optics Letters, Vol. 30, Issue 23
Enhanced reflectivity and stability of Sc/Si multilayers
conference, January 2004
- Yulin, Sergiy A.; Schaefers, Franz; Feigl, Torsten
- Optical Science and Technology, SPIE's 48th Annual Meeting, SPIE Proceedings
Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser
journal, January 2008
- Wachulak, P.; Grisham, M.; Heinbuch, S.
- Journal of the Optical Society of America B, Vol. 25, Issue 7
Multilayer coatings for the far and extreme ultraviolet
conference, May 2011
- Larruquert, Juan I.; Vidal-Dasilva, Manuela; García-Cortés, Sergio
- SPIE Optics + Optoelectronics, SPIE Proceedings
Experimental comparison of extreme-ultraviolet multilayers for solar physics
journal, January 2004
- Windt, David L.; Donguy, Soizik; Seely, John
- Applied Optics, Vol. 43, Issue 9
The Origins of Hot Plasma in the Solar Corona
journal, January 2011
- De Pontieu, B.; McIntosh, S. W.; Carlsson, M.
- Science, Vol. 331, Issue 6013
Normal-incidence silicon–gadolinium multilayers for imaging at 63 nm wavelength
journal, January 2008
- Kjornrattanawanich, Benjawan; Windt, David L.; Seely, John F.
- Optics Letters, Vol. 33, Issue 9
Subnanometer-Scale Measurements of the Interaction of Ultrafast Soft X-Ray Free-Electron-Laser Pulses with Matter
journal, April 2007
- Hau-Riege, Stefan P.; Chapman, Henry N.; Krzywinski, Jacek
- Physical Review Letters, Vol. 98, Issue 14
Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light
journal, January 2009
- Aquila, A.; Salmassi, F.; Liu, Yanwei
- Optics Express, Vol. 17, Issue 24
Works referencing / citing this record:
Advanced materials for multilayer mirrors for extreme ultraviolet solar astronomy
journal, January 2016
- Bogachev, S. A.; Chkhalo, N. I.; Kuzin, S. V.
- Applied Optics, Vol. 55, Issue 9
Y 2 O 3 optical constants between 5 nm and 50 nm
journal, January 2019
- Muhlestein, Joseph B.; Smith, Benjamin D.; Miles, Margaret
- Optics Express, Vol. 27, Issue 3
High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers
journal, January 2020
- Rebellato, Jennifer; Soufli, Regina; Meltchakov, Evgueni
- Optics Letters, Vol. 45, Issue 4