3D Hybrid Plasmonic Framework with Au Nanopillars Embedded in Nitride Multilayers Integrated on Si
Abstract
Integration of nanoscale photonic and plasmonic components on Si substrates is a critical step toward Si-based integrated nanophotonic devices. Herein, a set of unique complex 3D metamaterials with intercalated nanolayered and nanopillar structures with tunable plasmonic and optical properties on Si substrates is designed. More specifically, the 3D metamaterials combine metal (Au) nanopillars and alternating metal-nitride (Au-TiN and Au-TaN) nanolayers, epitaxially grown on Si substrates. The ultrafine Au nanopillars (d ≈ 3 nm) continuously grow throughout all the nanolayers with high epitaxial quality. Novel optical properties, such as highly anisotropic optical property, high absorbance covering the entire visible spectrum regime, and hyperbolic property in the visible regime, are demonstrated. Furthermore, a waveguide based on a silicon nitride (Si3N4) ridge with a multilayer structure is successfully fabricated. The demonstration of 3D nanoscale metamaterial design integrated on Si opens up a new route toward tunable metamaterials nanostructure designs with versatile material selection for various optical components in Si integrated photonics.
- Authors:
-
[2]
- Sun Yat-sen Univ., Guangdong (China); Purdue Univ., West Lafayette, IN (United States)
- Purdue Univ., West Lafayette, IN (United States)
- Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
- Texas A & M Univ., College Station, TX (United States)
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- North Carolina State Univ., Raleigh, NC (United States)
- Publication Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Los Alamos National Laboratory (LANL), Los Alamos, NM (United States). Center for Integrated Nanotechnologies (CINT)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA); National Science Foundation (NSF); USDOE Office of Science (SC); USDOE Laboratory Directed Research and Development (LDRD) Program
- OSTI Identifier:
- 1639062
- Alternate Identifier(s):
- OSTI ID: 1634850; OSTI ID: 1739958
- Report Number(s):
- SAND-2020-6350J; LA-UR-20-28042
Journal ID: ISSN 2196-7350; 686814
- Grant/Contract Number:
- AC04-94AL85000; NA0003525; 89233218CNA000001
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Advanced Materials Interfaces
- Additional Journal Information:
- Journal Volume: 7; Journal Issue: 17; Journal ID: ISSN 2196-7350
- Publisher:
- Wiley-VCH
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; Au nanopillars; hyperbolic metamaterials; metal–nitride nanocomposites; multilayers; Si integration
Citation Formats
Huang, Jijie, Wang, Xuejing, Li, Dongfang, Jin, Tiening, Lu, Ping, Zhang, Di, Lin, Pao‐Tai, Chen, Hou‐Tong, Narayan, Jagdish, Zhang, Xinghang, and Wang, Haiyan. 3D Hybrid Plasmonic Framework with Au Nanopillars Embedded in Nitride Multilayers Integrated on Si. United States: N. p., 2020.
Web. doi:10.1002/admi.202000493.
Huang, Jijie, Wang, Xuejing, Li, Dongfang, Jin, Tiening, Lu, Ping, Zhang, Di, Lin, Pao‐Tai, Chen, Hou‐Tong, Narayan, Jagdish, Zhang, Xinghang, & Wang, Haiyan. 3D Hybrid Plasmonic Framework with Au Nanopillars Embedded in Nitride Multilayers Integrated on Si. United States. https://doi.org/10.1002/admi.202000493
Huang, Jijie, Wang, Xuejing, Li, Dongfang, Jin, Tiening, Lu, Ping, Zhang, Di, Lin, Pao‐Tai, Chen, Hou‐Tong, Narayan, Jagdish, Zhang, Xinghang, and Wang, Haiyan. Tue .
"3D Hybrid Plasmonic Framework with Au Nanopillars Embedded in Nitride Multilayers Integrated on Si". United States. https://doi.org/10.1002/admi.202000493. https://www.osti.gov/servlets/purl/1639062.
@article{osti_1639062,
title = {3D Hybrid Plasmonic Framework with Au Nanopillars Embedded in Nitride Multilayers Integrated on Si},
author = {Huang, Jijie and Wang, Xuejing and Li, Dongfang and Jin, Tiening and Lu, Ping and Zhang, Di and Lin, Pao‐Tai and Chen, Hou‐Tong and Narayan, Jagdish and Zhang, Xinghang and Wang, Haiyan},
abstractNote = {Integration of nanoscale photonic and plasmonic components on Si substrates is a critical step toward Si-based integrated nanophotonic devices. Herein, a set of unique complex 3D metamaterials with intercalated nanolayered and nanopillar structures with tunable plasmonic and optical properties on Si substrates is designed. More specifically, the 3D metamaterials combine metal (Au) nanopillars and alternating metal-nitride (Au-TiN and Au-TaN) nanolayers, epitaxially grown on Si substrates. The ultrafine Au nanopillars (d ≈ 3 nm) continuously grow throughout all the nanolayers with high epitaxial quality. Novel optical properties, such as highly anisotropic optical property, high absorbance covering the entire visible spectrum regime, and hyperbolic property in the visible regime, are demonstrated. Furthermore, a waveguide based on a silicon nitride (Si3N4) ridge with a multilayer structure is successfully fabricated. The demonstration of 3D nanoscale metamaterial design integrated on Si opens up a new route toward tunable metamaterials nanostructure designs with versatile material selection for various optical components in Si integrated photonics.},
doi = {10.1002/admi.202000493},
journal = {Advanced Materials Interfaces},
number = 17,
volume = 7,
place = {United States},
year = {Tue Jun 23 00:00:00 EDT 2020},
month = {Tue Jun 23 00:00:00 EDT 2020}
}
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