Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review
Abstract
Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication/modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.
- Authors:
-
[1];
[2];
[4];
[4];
[6]
- Graz Univ. of Technology (Austria). Inst. of Electron Microscopy and Nanoalnalysis. Christian Doppler Lab. for Direct-Write Fabrication of 3D Nano-Probes (DEFINE); Graz Univ. of Technology (Austria). Inst. of Electron Microscopy and Nanoanalysis; Graz Centre for Electron Microscopy, Graz (Austria)
- Graz Univ. of Technology (Austria). Inst. of Electron Microscopy and Nanoalnalysis. Christian Doppler Lab. for Direct-Write Fabrication of 3D Nano-Probes (DEFINE)
- GETec Microscopy GmbH, Vienna (Austria)
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS); Univ. of Tennessee, Knoxville, TN (United States). Materials Science and Engineering
- Empa-Swiss Federal Labs for Materials Science and Technology, Thun (Switzerland). Mechanics of Materials and Nanostructures Lab.
- Goethe Univ., Frankfurt (Germany). Physics Inst.
- Publication Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division
- OSTI Identifier:
- 1628463
- Alternate Identifier(s):
- OSTI ID: 1761729
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Micromachines
- Additional Journal Information:
- Journal Volume: 11; Journal Issue: 1; Journal ID: ISSN 2072-666X
- Publisher:
- MDPI
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; Science & Technology - Other Topics; Instruments & Instrumentation
Citation Formats
Plank, Harald, Winkler, Robert, Schwalb, Christian H., Hütner, Johanna, Fowlkes, Jason D., Rack, Philip D., Utke, Ivo, and Huth, Michael. Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review. United States: N. p., 2019.
Web. doi:10.3390/mi11010048.
Plank, Harald, Winkler, Robert, Schwalb, Christian H., Hütner, Johanna, Fowlkes, Jason D., Rack, Philip D., Utke, Ivo, & Huth, Michael. Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review. United States. https://doi.org/10.3390/mi11010048
Plank, Harald, Winkler, Robert, Schwalb, Christian H., Hütner, Johanna, Fowlkes, Jason D., Rack, Philip D., Utke, Ivo, and Huth, Michael. Mon .
"Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review". United States. https://doi.org/10.3390/mi11010048. https://www.osti.gov/servlets/purl/1628463.
@article{osti_1628463,
title = {Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review},
author = {Plank, Harald and Winkler, Robert and Schwalb, Christian H. and Hütner, Johanna and Fowlkes, Jason D. and Rack, Philip D. and Utke, Ivo and Huth, Michael},
abstractNote = {Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication/modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.},
doi = {10.3390/mi11010048},
journal = {Micromachines},
number = 1,
volume = 11,
place = {United States},
year = {Mon Dec 30 00:00:00 EST 2019},
month = {Mon Dec 30 00:00:00 EST 2019}
}
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