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Title: 3D nanoprinting via focused electron beams

Abstract

Additive manufacturing of three-dimensional objects on the nanoscale is a very relevant topic but still a highly challenging task. Among the pool of nanofabrication techniques, focused electron beam induced deposition (FEBID) has recently developed from a trial-and-error laboratory method to a predictable 3D nanoprinting technology with unique advantages. This perspective article first introduces the basic principles of 3D-FEBID, followed by an overview of historical developments with a particular emphasis on the last three years. In this work, we examine different aspects of 3D nanoprinting such as the instrumental setup, fundamental growth mechanisms, simulations, computer aided design software solutions, material properties, and application studies. For each aspect, the individual challenges and limitations are reported on. Additionally, we share our outlook about possible solutions and studies currently under investigation. As a perspective, we also address the most urgent milestones of the future and speculate on applications ranging from optics to mechanics, magnetics, and electronics, all of them benefiting from the recently improved 3D FEBID synthesis technique.

Authors:
ORCiD logo [1]; ORCiD logo [2]; ORCiD logo [2]; ORCiD logo [1]
  1. Graz Univ. of Technology (Austria)
  2. Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Scientific User Facilities Division; National Science Foundation (NSF); Austrian Cooperative Research (ACR); Christian Doppler Research Association (CDL-DEFINE)
OSTI Identifier:
1543209
Grant/Contract Number:  
AC05-00OR22725
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 125; Journal Issue: 21; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Winkler, R., Fowlkes, J. D., Rack, P. D., and Plank, H. 3D nanoprinting via focused electron beams. United States: N. p., 2019. Web. doi:10.1063/1.5092372.
Winkler, R., Fowlkes, J. D., Rack, P. D., & Plank, H. 3D nanoprinting via focused electron beams. United States. doi:10.1063/1.5092372.
Winkler, R., Fowlkes, J. D., Rack, P. D., and Plank, H. Thu . "3D nanoprinting via focused electron beams". United States. doi:10.1063/1.5092372.
@article{osti_1543209,
title = {3D nanoprinting via focused electron beams},
author = {Winkler, R. and Fowlkes, J. D. and Rack, P. D. and Plank, H.},
abstractNote = {Additive manufacturing of three-dimensional objects on the nanoscale is a very relevant topic but still a highly challenging task. Among the pool of nanofabrication techniques, focused electron beam induced deposition (FEBID) has recently developed from a trial-and-error laboratory method to a predictable 3D nanoprinting technology with unique advantages. This perspective article first introduces the basic principles of 3D-FEBID, followed by an overview of historical developments with a particular emphasis on the last three years. In this work, we examine different aspects of 3D nanoprinting such as the instrumental setup, fundamental growth mechanisms, simulations, computer aided design software solutions, material properties, and application studies. For each aspect, the individual challenges and limitations are reported on. Additionally, we share our outlook about possible solutions and studies currently under investigation. As a perspective, we also address the most urgent milestones of the future and speculate on applications ranging from optics to mechanics, magnetics, and electronics, all of them benefiting from the recently improved 3D FEBID synthesis technique.},
doi = {10.1063/1.5092372},
journal = {Journal of Applied Physics},
number = 21,
volume = 125,
place = {United States},
year = {2019},
month = {6}
}

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