High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers
Abstract
In this Letter, we have developed new and highly efficient periodic multilayer mirrors Al/Sc, Al/Sc/SiC, and Mo/Al/Sc with optimized reflectance at wavelengths between 40 and 65 nm. We have reached record values in measured peak reflectance: 57.5% at 44.7 nm and 46.5% at 51 nm, with Al/Sc/SiC at near-normal incidence. Furthermore, to the best of our knowledge, we have achieved the largest reported bandwidth with Mo/Al/Sc at 57 nm and the narrowest bandwidth with Al/Sc at a 60 nm wavelength. These new and promising results demonstrate that Al/Sc-based multilayer coatings are excellent candidates for future generations of extreme ultraviolet (EUV) instruments for solar physics, EUV lasers, and attosecond science, in a wavelength range that has not been fully explored.
- Authors:
-
[1];
- Univ. Paris-Saclay, Palaiseau Cedex (France); Centre National d-Etudes Spatiales, Toulouse (France)
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Univ. Paris-Saclay, Palaiseau Cedex (France)
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1881607
- Alternate Identifier(s):
- OSTI ID: 1598368
- Report Number(s):
- LLNL-JRNL-799367
Journal ID: ISSN 0146-9592; 1002139
- Grant/Contract Number:
- AC52-07NA27344; Professional Research and Teaching Leave; AC03-76F00098
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Optics Letters
- Additional Journal Information:
- Journal Volume: 45; Journal Issue: 4; Journal ID: ISSN 0146-9592
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. United States: N. p., 2020.
Web. doi:10.1364/ol.384734.
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, & Delmotte, Franck. High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers. United States. https://doi.org/10.1364/ol.384734
Rebellato, Jennifer, Soufli, Regina, Meltchakov, Evgueni, Gullikson, Eric, de Rossi, Sébastien, and Delmotte, Franck. Mon .
"High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers". United States. https://doi.org/10.1364/ol.384734. https://www.osti.gov/servlets/purl/1881607.
@article{osti_1881607,
title = {High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers},
author = {Rebellato, Jennifer and Soufli, Regina and Meltchakov, Evgueni and Gullikson, Eric and de Rossi, Sébastien and Delmotte, Franck},
abstractNote = {In this Letter, we have developed new and highly efficient periodic multilayer mirrors Al/Sc, Al/Sc/SiC, and Mo/Al/Sc with optimized reflectance at wavelengths between 40 and 65 nm. We have reached record values in measured peak reflectance: 57.5% at 44.7 nm and 46.5% at 51 nm, with Al/Sc/SiC at near-normal incidence. Furthermore, to the best of our knowledge, we have achieved the largest reported bandwidth with Mo/Al/Sc at 57 nm and the narrowest bandwidth with Al/Sc at a 60 nm wavelength. These new and promising results demonstrate that Al/Sc-based multilayer coatings are excellent candidates for future generations of extreme ultraviolet (EUV) instruments for solar physics, EUV lasers, and attosecond science, in a wavelength range that has not been fully explored.},
doi = {10.1364/ol.384734},
journal = {Optics Letters},
number = 4,
volume = 45,
place = {United States},
year = {Mon Feb 10 00:00:00 EST 2020},
month = {Mon Feb 10 00:00:00 EST 2020}
}
Free Publicly Available Full Text
Publisher's Version of Record
Other availability
Search WorldCat to find libraries that may hold this journal
Cited by: 7 works
Citation information provided by
Web of Science
Web of Science
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Extreme Ultraviolet Multilayer Nanostructures and Their Application to Solar Plasma Observations: A Review
journal, January 2019
- Corso, Alain J.; Pelizzo, Maria G.
- Journal of Nanoscience and Nanotechnology, Vol. 19, Issue 1
Stable Multilayer Reflective Coatings for λ(HeI) = 58.4 nm for the KORTES Solar Telescope
journal, February 2019
- Polkovnikov, V. N.; Chkhalo, N. I.; Meltchakov, E.
- Technical Physics Letters, Vol. 45, Issue 2
Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region
journal, January 2012
- Fernández-Perea, Mónica; Soufli, Regina; Robinson, Jeff C.
- Optics Express, Vol. 20, Issue 21
Normal-incidence silicon–gadolinium multilayers for imaging at 63 nm wavelength
journal, January 2008
- Kjornrattanawanich, Benjawan; Windt, David L.; Seely, John F.
- Optics Letters, Vol. 33, Issue 9
Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light
journal, January 2009
- Aquila, A.; Salmassi, F.; Liu, Yanwei
- Optics Express, Vol. 17, Issue 24
Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings
journal, July 2012
- Soufli, Regina; Fernández-Perea, Mónica; Baker, Sherry L.
- Applied Physics Letters, Vol. 101, Issue 4
SiC/Tb and Si/Tb multilayer coatings for extreme ultraviolet solar imaging
journal, January 2006
- Kjornrattanawanich, Benjawan; Windt, David L.; Seely, John F.
- Applied Optics, Vol. 45, Issue 8
Multilayer optics for coherent EUV/X-ray laser sources
conference, September 2015
- Delmotte, F.; Dehlinger, M.; Bourassin-Bouchet, Ch.
- SPIE Optical Engineering + Applications, SPIE Proceedings
Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm
journal, January 2005
- Gautier, Julien; Delmotte, Franck; Roulliay, Marc
- Applied Optics, Vol. 44, Issue 3
Efficient method for the determination of extreme-ultraviolet optical constants in reactive materials: application to scandium and titanium
journal, January 2004
- Uspenskii, Yu. A.; Seely, John F.; Popov, N. L.
- Journal of the Optical Society of America A, Vol. 21, Issue 2
Amorphous silicon carbide coatings for extreme ultraviolet optics
journal, January 1988
- Kortright, J. B.; Windt, David L.
- Applied Optics, Vol. 27, Issue 14
Development of Al-based multilayer optics for EUV
journal, October 2009
- Meltchakov, E.; Hecquet, C.; Roulliay, M.
- Applied Physics A, Vol. 98, Issue 1
Single and multi-channel Al-based multilayer systems for space applications in EUV range
conference, May 2013
- Meltchakov, E.; De Rossi, S.; Mercier, R.
- SPIE Optics + Optoelectronics, SPIE Proceedings
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993
- Henke, B. L.; Gullikson, E. M.; Davis, J. C.
- Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342
High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
journal, May 1998
- Underwood, J. H.; Gullikson, E. M.
- Journal of Electron Spectroscopy and Related Phenomena, Vol. 92, Issue 1-3
Recent developments in EUV reflectometry at the Advanced Light Source
conference, August 2001
- Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B.
- 26th Annual International Symposium on Microlithography, SPIE Proceedings
IMD—Software for modeling the optical properties of multilayer films
journal, January 1998
- Windt, David L.
- Computers in Physics, Vol. 12, Issue 4
Enhanced reflectivity and stability of Sc/Si multilayers
conference, January 2004
- Yulin, Sergiy A.; Schaefers, Franz; Feigl, Torsten
- Optical Science and Technology, SPIE's 48th Annual Meeting, SPIE Proceedings