Volatile organometallic complexes suitable for use in chemical vapor depositions on metal oxide films
Abstract
Novel ligated compounds of tin, titanium, and zinc are useful as metal oxide CVD precursor compounds without the detriments of extreme reactivity yet maintaining the ability to produce high quality metal oxide coating by contact with heated substrates.
- Inventors:
- Issue Date:
- Research Org.:
- National Renewable Energy Laboratory (NREL), Golden, CO (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174514
- Patent Number(s):
- 6627765
- Application Number:
- 10/150,561
- Assignee:
- First Solar, LLC (Perrysburg, OH)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C03 - GLASS C03C - CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS
- DOE Contract Number:
- AC36-98GO10337
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Giolando, Dean M. Volatile organometallic complexes suitable for use in chemical vapor depositions on metal oxide films. United States: N. p., 2003.
Web.
Giolando, Dean M. Volatile organometallic complexes suitable for use in chemical vapor depositions on metal oxide films. United States.
Giolando, Dean M. Tue .
"Volatile organometallic complexes suitable for use in chemical vapor depositions on metal oxide films". United States. https://www.osti.gov/servlets/purl/1174514.
@article{osti_1174514,
title = {Volatile organometallic complexes suitable for use in chemical vapor depositions on metal oxide films},
author = {Giolando, Dean M.},
abstractNote = {Novel ligated compounds of tin, titanium, and zinc are useful as metal oxide CVD precursor compounds without the detriments of extreme reactivity yet maintaining the ability to produce high quality metal oxide coating by contact with heated substrates.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 30 00:00:00 EDT 2003},
month = {Tue Sep 30 00:00:00 EDT 2003}
}
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Works referenced in this record:
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- Journal de Chimie Physique, Vol. 69
Complexes of Stannic Chloride with Aromatic Hydrocarbons and Oxygen-Containing Donors in Solution
journal, July 1964
- Myher, J. J.; Russell, K. E.
- Canadian Journal of Chemistry, Vol. 42, Issue 7