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Title: Chemical vapor deposition using N,O polydentate ligand complexes of metals

Complexes of metals and N,O polydentate ligands are useful as precursors in the preparation of doped zinc oxide coatings by chemical vapor deposition.
Inventors:
; ;
Issue Date:
OSTI Identifier:
1337677
Assignee:
Arkema Inc. (King of Prussia, PA NETL
Patent Number(s):
9,528,182
Application Number:
13/377,858
Contract Number:
FC26-08NT01576
Resource Relation:
Patent File Date: 2010 Jun 09
Research Org:
Arkema Inc. King of Prussia, PA (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

Other works cited in this record:

Intramolecularly stabilized organoaluminium and organogallium compounds: synthesis and X-ray crystal structures of some dimethylaluminium and -gallium alkoxides Me2MOROR′ and amides Me2MNHROR′
journal, April 1996
  • Schumann, Herbert; Frick, Michael; Heymer, Bernd
  • Journal of Organometallic Chemistry, Vol. 512, Issue 1-2, p. 117-126
  • DOI: 10.1016/0022-328X(95)05917-E

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