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Title: Aerosol chemical vapor deposition of metal oxide films

Abstract

A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said FIELD OF THE INVENTION The present invention relates to the field of film coating deposition techniques, and more particularly to the deposition of multicomponent metal oxide films by aerosol chemical vapor deposition. Thismore » invention is the result of a contract with the Department of Energy (Contract No. W-7405-ENG-36).« less

Inventors:
 [1];  [2]
  1. 4745 Trinity Dr., Los Alamos, NM 87544
  2. 5200 Noreen Dr. NE., Albuquerque, NM 87111
Issue Date:
Research Org.:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
OSTI Identifier:
869121
Patent Number(s):
5278138
Assignee:
Ott, Kevin C. (4745 Trinity Dr., Los Alamos, NM 87544);Kodas, Toivo T. (5200 Noreen Dr. NE., Albuquerque, NM 87111)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
W-7405-ENG-36
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
aerosol; chemical; vapor; deposition; metal; oxide; films; process; preparing; film; multicomponent; including; forming; solution; comprised; suitable; solvent; precursor; compounds; capable; volatilizing; temperatures; decomposition; temperature; passing; combination; oxygen-containing; carrier; gas; heated; zone; sufficient; evaporate; volatilize; volatilized; surface; substrate; decompose; whereby; atoms; contained; deposited; disclosed; addition; coated; article; comprising; conforming; selected; consisting; silicon; magnesium; yttrium-stabilized; zirconium; sapphire; lanthanum; gallate; characterized; substantially; uniform; thickness; field; relates; coating; techniques; particularly; result; contract; department; energy; w-7405-eng-36; solution comprised; compounds capable; metal atom; article comprising; oxide films; suitable solvent; uniform thickness; chemical vapor; carrier gas; metal oxide; vapor deposition; substantially uniform; temperature sufficient; magnesium oxide; oxide film; zirconium oxide; deposition techniques; film coating; decomposition temperature; metal atoms; precursor compounds; suitable oxygen; stabilized zirconium; heated zone; sufficient temperature; deposition technique; coated article; precursor compound; substrate selected; oxide including; /505/427/

Citation Formats

Ott, Kevin C, and Kodas, Toivo T. Aerosol chemical vapor deposition of metal oxide films. United States: N. p., 1994. Web.
Ott, Kevin C, & Kodas, Toivo T. Aerosol chemical vapor deposition of metal oxide films. United States.
Ott, Kevin C, and Kodas, Toivo T. Sat . "Aerosol chemical vapor deposition of metal oxide films". United States. https://www.osti.gov/servlets/purl/869121.
@article{osti_869121,
title = {Aerosol chemical vapor deposition of metal oxide films},
author = {Ott, Kevin C and Kodas, Toivo T},
abstractNote = {A process of preparing a film of a multicomponent metal oxide including: forming an aerosol from a solution comprised of a suitable solvent and at least two precursor compounds capable of volatilizing at temperatures lower than the decomposition temperature of said precursor compounds; passing said aerosol in combination with a suitable oxygen-containing carrier gas into a heated zone, said heated zone having a temperature sufficient to evaporate the solvent and volatilize said precursor compounds; and passing said volatilized precursor compounds against the surface of a substrate, said substrate having a sufficient temperature to decompose said volatilized precursor compounds whereby metal atoms contained within said volatilized precursor compounds are deposited as a metal oxide film upon the substrate is disclosed. In addition, a coated article comprising a multicomponent metal oxide film conforming to the surface of a substrate selected from the group consisting of silicon, magnesium oxide, yttrium-stabilized zirconium oxide, sapphire, or lanthanum gallate, said multicomponent metal oxide film characterized as having a substantially uniform thickness upon said FIELD OF THE INVENTION The present invention relates to the field of film coating deposition techniques, and more particularly to the deposition of multicomponent metal oxide films by aerosol chemical vapor deposition. This invention is the result of a contract with the Department of Energy (Contract No. W-7405-ENG-36).},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {1}
}

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Works referenced in this record:

Bismuth strontium calcium copper oxide high-Tc superconducting films from nitrate precursors
journal, August 1988


Formation of Y-Ba-Cu-O Superconducting Film by a Spray Pyrolysis Method
journal, October 1987


Synthesis of small particle size YBa2Cu3O7−x by a vapor phase process
journal, September 1988


Preparation and characterization of copper(II) oxide thin films grown by a novel spray pyrolysis method
journal, June 1989


High Tc superconducting films prepared by pyrolysis of an ultrasonic-generated aerosol
journal, May 1989


Generation of thick Ba 2 YCu 3 O 7 films by aerosol deposition
journal, May 1989


Chemical vapor deposition of the superconducting YBa 2 Cu 3 O 7− x phase using halides as metal sources
journal, June 1989


Aerosol flow reactor production of fine Y 1 Ba 2 Cu 3 O 7 powder: Fabrication of superconducting ceramics
journal, May 1988


Epitaxial growth of high T c superconducting Y‐Ba‐Cu‐O thin films on (001)MgO by a chemical spray pyrolysis method
journal, September 1988