Apparatus to position a microelectromechanical platform
Abstract
The present invention comprises a microelectromechanical positioner to achieve substantially translational positioning of a platform without rotational motion, thereby maintaining a constant angular orientation of the platform during movement. A linkage mechanism of the positioner can comprise parallelogram linkages to constrain the rotational motion of the platform. Such linkages further can comprise flexural hinges or other turning joints at the linkage pivots to eliminate the need for rubbing surfaces. A plurality of the linkage mechanisms can be used to enable translational motion of the platform with two degrees of freedom. A variety of means can be used to actuate the positioner. Independent actuation of the anchor links of the linkage mechanisms with rotary electrostatic actuators can be used to provide controlled translational movement of the platform.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174502
- Patent Number(s):
- 6624548
- Application Number:
- 09/964,922
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H02 - GENERATION H02N - ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Miller, Samuel Lee, and Rodgers, Murray Steven. Apparatus to position a microelectromechanical platform. United States: N. p., 2003.
Web.
Miller, Samuel Lee, & Rodgers, Murray Steven. Apparatus to position a microelectromechanical platform. United States.
Miller, Samuel Lee, and Rodgers, Murray Steven. Tue .
"Apparatus to position a microelectromechanical platform". United States. https://www.osti.gov/servlets/purl/1174502.
@article{osti_1174502,
title = {Apparatus to position a microelectromechanical platform},
author = {Miller, Samuel Lee and Rodgers, Murray Steven},
abstractNote = {The present invention comprises a microelectromechanical positioner to achieve substantially translational positioning of a platform without rotational motion, thereby maintaining a constant angular orientation of the platform during movement. A linkage mechanism of the positioner can comprise parallelogram linkages to constrain the rotational motion of the platform. Such linkages further can comprise flexural hinges or other turning joints at the linkage pivots to eliminate the need for rubbing surfaces. A plurality of the linkage mechanisms can be used to enable translational motion of the platform with two degrees of freedom. A variety of means can be used to actuate the positioner. Independent actuation of the anchor links of the linkage mechanisms with rotary electrostatic actuators can be used to provide controlled translational movement of the platform.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 23 00:00:00 EDT 2003},
month = {Tue Sep 23 00:00:00 EDT 2003}
}
Works referenced in this record:
Fabrication of diffractive optical elements for an integrated compact optical microelectromechanical system laser scanner
journal, January 2000
- Wendt, J. R.; Krygowski, T. W.; Vawter, G. A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 6