Three-dimensional microelectromechanical tilting platform operated by gear-driven racks

Klody, Kelly A.; Habbit, Robert D.

Title: Three-dimensional microelectromechanical tilting platform operated by gear-driven racks

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Abstract

A microelectromechanical (MEM) tiltable-platform apparatus is disclosed which utilizes a light-reflective platform (i.e. a micromirror) which is supported above a substrate by flexures which can be bent upwards to tilt the platform in any direction over an angle of generally .+-.10 degrees using a gear-driven rack attached to each flexure. Each rack is driven by a rotary microengine (i.e. a micromotor); and an optional thermal actuator can be used in combination with each microengine for initially an initial uplifting of the platform away from the substrate. The MEM apparatus has applications for optical switching (e.g. between a pair of optical fibers) or for optical beam scanning.

Inventors:: Klody, Kelly A.; Habbit, Jr., Robert D.

Issue Date:: 2005-11-01

Research Org.:: Sandia National Lab. (SNL-CA), Livermore, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1175540

Patent Number(s):: 6960849

Application Number:: 10/404,780

Assignee:: Sandia Corporation

Patent Classifications (CPCs):: G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B6/3584 - {constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
G02B26/0841 - {the reflecting element being moved or deformed by electrostatic means}
G02B6/3576 - {Temperature or heat actuation
G02B6/3566 - {involving bending a beam, e.g. with cantilever}
G02B6/3518 - {the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
G02B6/359 - {of the position of the moving element itself during switching, i.e. without monitoring the switched beams}

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING

Citation Formats


                    Klody, Kelly A., and Habbit, Jr., Robert D. Three-dimensional microelectromechanical tilting platform operated by gear-driven racks.  United States: N. p., 2005. 
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                    Klody, Kelly A., & Habbit, Jr., Robert D. Three-dimensional microelectromechanical tilting platform operated by gear-driven racks.  United States.

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                    Klody, Kelly A., and Habbit, Jr., Robert D. Tue .  
        "Three-dimensional microelectromechanical tilting platform operated by gear-driven racks".  United States.  https://www.osti.gov/servlets/purl/1175540.

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@article{osti_1175540,

  title        = {Three-dimensional microelectromechanical tilting platform operated by gear-driven racks},

  author       = {Klody, Kelly A. and Habbit, Jr., Robert D.},

  abstractNote = {A microelectromechanical (MEM) tiltable-platform apparatus is disclosed which utilizes a light-reflective platform (i.e. a micromirror) which is supported above a substrate by flexures which can be bent upwards to tilt the platform in any direction over an angle of generally .+-.10 degrees using a gear-driven rack attached to each flexure. Each rack is driven by a rotary microengine (i.e. a micromotor); and an optional thermal actuator can be used in combination with each microengine for initially an initial uplifting of the platform away from the substrate. The MEM apparatus has applications for optical switching (e.g. between a pair of optical fibers) or for optical beam scanning.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2005},

  month        = {11}

}

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