skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom

Abstract

A microelectromechanical (MEM) apparatus is disclosed which includes a shuttle suspended above a substrate by two or more sets of tensile-stressed beams which are operatively connected to the shuttle and which can comprise tungsten or a silicon nitride/polysilicon composite structure. Initially, the tensile stress in each set of beams is balanced. However, the tensile stress can be unbalanced by heating one or more of the sets of beams; and this can be used to move the shuttle over a distance of up to several tens of microns. The MEM apparatus can be used to form a MEM relay having relatively high contact and opening forces, and with or without a latching capability.

Inventors:
 [1]
  1. Albuquerque, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL-NM), Albuquerque, NM
Sponsoring Org.:
USDOE
OSTI Identifier:
970552
Patent Number(s):
7,339,454
Application Number:
11/103,311
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Fleming, James G. Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom. United States: N. p., 2008. Web.
Fleming, James G. Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom. United States.
Fleming, James G. Tue . "Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom". United States. https://www.osti.gov/servlets/purl/970552.
@article{osti_970552,
title = {Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom},
author = {Fleming, James G},
abstractNote = {A microelectromechanical (MEM) apparatus is disclosed which includes a shuttle suspended above a substrate by two or more sets of tensile-stressed beams which are operatively connected to the shuttle and which can comprise tungsten or a silicon nitride/polysilicon composite structure. Initially, the tensile stress in each set of beams is balanced. However, the tensile stress can be unbalanced by heating one or more of the sets of beams; and this can be used to move the shuttle over a distance of up to several tens of microns. The MEM apparatus can be used to form a MEM relay having relatively high contact and opening forces, and with or without a latching capability.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {3}
}

Patent:

Save / Share: