Microelectromechanical apparatus for elevating and tilting a platform
Abstract
A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with-the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-CA), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1174935
- Patent Number(s):
- 6759787
- Application Number:
- 10/191,917
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
G - PHYSICS G02 - OPTICS G02B - OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Miller, Samuel Lee, McWhorter, Paul Jackson, Rodgers, Murray Steven, Sniegowski, Jeffry J., and Barnes, Stephen M. Microelectromechanical apparatus for elevating and tilting a platform. United States: N. p., 2004.
Web.
Miller, Samuel Lee, McWhorter, Paul Jackson, Rodgers, Murray Steven, Sniegowski, Jeffry J., & Barnes, Stephen M. Microelectromechanical apparatus for elevating and tilting a platform. United States.
Miller, Samuel Lee, McWhorter, Paul Jackson, Rodgers, Murray Steven, Sniegowski, Jeffry J., and Barnes, Stephen M. Tue .
"Microelectromechanical apparatus for elevating and tilting a platform". United States. https://www.osti.gov/servlets/purl/1174935.
@article{osti_1174935,
title = {Microelectromechanical apparatus for elevating and tilting a platform},
author = {Miller, Samuel Lee and McWhorter, Paul Jackson and Rodgers, Murray Steven and Sniegowski, Jeffry J. and Barnes, Stephen M.},
abstractNote = {A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with-the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 06 00:00:00 EDT 2004},
month = {Tue Jul 06 00:00:00 EDT 2004}
}
Works referenced in this record:
4x4 MEMS optical cross-connections (OXCs)
conference, October 2000
- Liu, Ai Q.; Zhang, Xu M.; Lam, Yee Loy
- International Symposium on Microelectronics and Assembly, SPIE Proceedings