Microelectromechanical reciprocating-tooth indexing apparatus
- Albuquerque, NM
An indexing apparatus is disclosed that can be used to rotate a gear or move a rack in a precise, controllable manner. The indexing apparatus, based on a reciprocating shuttle driven by one or more actuators, can be formed either as a micromachine, or as a millimachine. The reciprocating shuttle of the indexing apparatus can be driven by a thermal, electrostatic or electromagnetic actuator, with one or more wedge-shaped drive teeth of the shuttle being moveable to engage and slide against indexing teeth on the gear or rack, thereby moving the gear or rack. The indexing apparatus can be formed by either surface micromachining processes or LIGA processes, depending on the size of the apparatus that is to be formed.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Number(s):
- US 5959376
- OSTI ID:
- 872549
- Country of Publication:
- United States
- Language:
- English
Surface Micromachined Polysilicon Theraml Actuator Arrays and Applications
|
conference | June 1996 |
Similar Records
Microelectromechanical ratcheting apparatus
Microelectromechanical ratcheting apparatus
Related Subjects
reciprocating-tooth
indexing
apparatus
disclosed
rotate
gear
move
rack
precise
controllable
manner
based
reciprocating
shuttle
driven
actuators
formed
micromachine
millimachine
thermal
electrostatic
electromagnetic
actuator
wedge-shaped
drive
teeth
moveable
engage
slide
moving
surface
micromachining
processes
liga
depending
size
surface micromachining
machining process
indexing apparatus
micromachining process
micromachining processes
controllable manner
/310/74/