Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus
Abstract
Laser-assisted apparatus and methods for performing nanoscale material processing, including nanodeposition of materials, can be controlled very precisely to yield both simple and complex structures with sizes less than 100 nm. Optical or thermal energy in the near field of a photon (laser) pulse is used to fabricate submicron and nanometer structures on a substrate. A wide variety of laser material processing techniques can be adapted for use including, subtractive (e.g., ablation, machining or chemical etching), additive (e.g., chemical vapor deposition, selective self-assembly), and modification (e.g., phase transformation, doping) processes. Additionally, the apparatus can be integrated into imaging instruments, such as SEM and TEM, to allow for real-time imaging of the material processing.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1108010
- Patent Number(s):
- 8580130
- Application Number:
- 12/743,550
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC02-05CH11231
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Mao, Samuel S, Grigoropoulos, Costas P, Hwang, David J, and Minor, Andrew M. Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus. United States: N. p., 2013.
Web.
Mao, Samuel S, Grigoropoulos, Costas P, Hwang, David J, & Minor, Andrew M. Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus. United States.
Mao, Samuel S, Grigoropoulos, Costas P, Hwang, David J, and Minor, Andrew M. Tue .
"Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus". United States. https://www.osti.gov/servlets/purl/1108010.
@article{osti_1108010,
title = {Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus},
author = {Mao, Samuel S and Grigoropoulos, Costas P and Hwang, David J and Minor, Andrew M},
abstractNote = {Laser-assisted apparatus and methods for performing nanoscale material processing, including nanodeposition of materials, can be controlled very precisely to yield both simple and complex structures with sizes less than 100 nm. Optical or thermal energy in the near field of a photon (laser) pulse is used to fabricate submicron and nanometer structures on a substrate. A wide variety of laser material processing techniques can be adapted for use including, subtractive (e.g., ablation, machining or chemical etching), additive (e.g., chemical vapor deposition, selective self-assembly), and modification (e.g., phase transformation, doping) processes. Additionally, the apparatus can be integrated into imaging instruments, such as SEM and TEM, to allow for real-time imaging of the material processing.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 12 00:00:00 EST 2013},
month = {Tue Nov 12 00:00:00 EST 2013}
}
Works referenced in this record:
Method of producing compound nanorods and thin films
patent, August 2010
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- US Patent Document 7,767,272
Room-Temperature Ultraviolet Nanowire Nanolasers
journal, June 2001
- Huang, Michael H.; Mao, Samuel; Feick, Henning
- Science, Vol. 292, Issue 5523, p. 1897-1899
Nanolasers: lasing from nanoscale quantum wires
journal, January 2004
- Mao, Samuel S.
- International Journal of Nanotechnology, Vol. 1, Issue 1/2