Laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof

Zhao, Hongping; Chen, Zhaoying

Title: Laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof

Patent · Tue Nov 01 00:00:00 EDT 2022

OSTI ID:1986774

Zhao, Hongping; Chen, Zhaoying

Disclosed herein are laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof.

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Research Organization:: The Ohio State Univ., Columbus, OH (United States)

Sponsoring Organization:: USDOE Advanced Research Projects Agency - Energy (ARPA-E)

DOE Contract Number:: GRT00052380

Assignee:: Ohio State Innovation Foundation (Columbus, OH)

Patent Number(s):: 11,486,039

Application Number:: 16/876,798

OSTI ID:: 1986774

Resource Relation:: Patent File Date: 05/18/2020

Country of Publication:: United States

Language:: English

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