Preparation of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} thin film by laser-assisted metal organic chemical vapor deposition using highly volatile fluorocarbon-based Ba source
Journal Article
·
· Journal of Materials Research
- Superconductivity Research Laboratory, Nagoya Division, ISTEC, 2-4-1 Mutsuno, Atsuta-ku, Nagoya 456 (Japan)
Superconducting oxide films of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} (YBCO) were produced on magnesia (MgO) single crystalline substrates (100) by laser-assisted metalorganic chemical vapor deposition. The highly volatile Ba(hfa){sub 2} {center_dot} tetraglyme was used as a Ba source metal-organic material. Smoother surface YBCO film was obtained with KrF laser irradiation than without. However, KrF laser irradiation does not lower the temperature for formation of YBCO(123) phase. YBCO film prepared at 750{degree}C on the MgO substrate showed a {ital T}{sub {ital c}}({ital R}=0) of 69 K, that prepared with KrF laser irradiation 85 K. When water was added to the reaction chamber, barium fluoride was reduced and the YBCO formation was detected at a temperature of 650{degree}C and higher. YBCO film prepared at the temperature of 700{degree}C for 40 minutes without KrF laser irradiation behaves as a semiconductor, and one prepared with laser irradiation showed a {ital T}{sub {ital c}}({ital R}=0) of 78 K. {copyright} {ital 1996 Materials Research Society.}
- OSTI ID:
- 399775
- Journal Information:
- Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 11 Vol. 11; ISSN JMREEE; ISSN 0884-2914
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
BARIUM OXIDES
CHEMICAL VAPOR DEPOSITION
COPPER OXIDES
ELECTRIC CONDUCTIVITY
HIGH-TC SUPERCONDUCTORS
LASER RADIATION
ORGANOMETALLIC COMPOUNDS
SUPERCONDUCTING FILMS
TEMPERATURE DEPENDENCE
TEMPERATURE RANGE 0400-1000 K
TEMPERATURE RANGE 1000-4000 K
THIN FILMS
TRANSITION TEMPERATURE
YTTRIUM OXIDES
BARIUM OXIDES
CHEMICAL VAPOR DEPOSITION
COPPER OXIDES
ELECTRIC CONDUCTIVITY
HIGH-TC SUPERCONDUCTORS
LASER RADIATION
ORGANOMETALLIC COMPOUNDS
SUPERCONDUCTING FILMS
TEMPERATURE DEPENDENCE
TEMPERATURE RANGE 0400-1000 K
TEMPERATURE RANGE 1000-4000 K
THIN FILMS
TRANSITION TEMPERATURE
YTTRIUM OXIDES