Laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof for suppressing background carbon incorporation

Zhao, Hongping; Chen, Zhaoying; Zhang, Yuxuan

Title: Laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof for suppressing background carbon incorporation

Patent · Tue Dec 19 00:00:00 EST 2023

OSTI ID:2293985

Zhao, Hongping; Chen, Zhaoying; Zhang, Yuxuan

Disclosed herein are laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof for suppressing background carbon incorporation.

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Research Organization:: The Ohio State Univ., Columbus, OH (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AR0001036

Assignee:: Ohio State Innovation Foundation (Columbus, OH)

Patent Number(s):: 11,846,024

Application Number:: 17/201,815

OSTI ID:: 2293985

Resource Relation:: Patent File Date: 03/15/2021

Country of Publication:: United States

Language:: English

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