Mesoporous silica film from a solution containing a surfactant and methods of making same
Abstract
The present invention is a mesoporous silica film having a low dielectric constant and method of making having the steps of combining a surfactant in a silica precursor solution, spin-coating a film from this solution mixture, forming a partially hydroxylated mesoporous film, and dehydroxylating the hydroxylated film to obtain the mesoporous film. It is advantageous that the small polyoxyethylene ether surfactants used in spin-coated films as described in the present invention will result in fine pores smaller on average than about 20 nm. The resulting mesoporous film has a dielectric constant less than 3, which is stable in moist air with a specific humidity. The present invention provides a method for superior control of film thickness and thickness uniformity over a coated wafer, and films with low dielectric constant.
- Inventors:
-
- West Richland, WA
- Cambridge, MA
- Richland, WA
- Kennewick, WA
- Issue Date:
- Research Org.:
- Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 874160
- Patent Number(s):
- 6329017
- Application Number:
- 09/413,062
- Assignee:
- Battelle Memorial Institute (Richland, WA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C01 - INORGANIC CHEMISTRY C01B - NON-METALLIC ELEMENTS
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC06-76RL01830
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- mesoporous; silica; film; solution; containing; surfactant; methods; dielectric; constant; method; steps; combining; precursor; spin-coating; mixture; forming; partially; hydroxylated; dehydroxylating; obtain; advantageous; polyoxyethylene; surfactants; spin-coated; films; described; result; fine; pores; average; 20; nm; resulting; stable; moist; air; specific; humidity; provides; superior; control; thickness; uniformity; coated; wafer; film thickness; porous silica; /427/
Citation Formats
Liu, Jun, Domansky, Karel, Li, Xiaohong, Fryxell, Glen E, Baskaran, Suresh, Kohler, Nathan J, Thevuthasan, Suntharampillai, Coyle, Christopher A, and Birnbaum, Jerome C. Mesoporous silica film from a solution containing a surfactant and methods of making same. United States: N. p., 2001.
Web.
Liu, Jun, Domansky, Karel, Li, Xiaohong, Fryxell, Glen E, Baskaran, Suresh, Kohler, Nathan J, Thevuthasan, Suntharampillai, Coyle, Christopher A, & Birnbaum, Jerome C. Mesoporous silica film from a solution containing a surfactant and methods of making same. United States.
Liu, Jun, Domansky, Karel, Li, Xiaohong, Fryxell, Glen E, Baskaran, Suresh, Kohler, Nathan J, Thevuthasan, Suntharampillai, Coyle, Christopher A, and Birnbaum, Jerome C. Tue .
"Mesoporous silica film from a solution containing a surfactant and methods of making same". United States. https://www.osti.gov/servlets/purl/874160.
@article{osti_874160,
title = {Mesoporous silica film from a solution containing a surfactant and methods of making same},
author = {Liu, Jun and Domansky, Karel and Li, Xiaohong and Fryxell, Glen E and Baskaran, Suresh and Kohler, Nathan J and Thevuthasan, Suntharampillai and Coyle, Christopher A and Birnbaum, Jerome C},
abstractNote = {The present invention is a mesoporous silica film having a low dielectric constant and method of making having the steps of combining a surfactant in a silica precursor solution, spin-coating a film from this solution mixture, forming a partially hydroxylated mesoporous film, and dehydroxylating the hydroxylated film to obtain the mesoporous film. It is advantageous that the small polyoxyethylene ether surfactants used in spin-coated films as described in the present invention will result in fine pores smaller on average than about 20 nm. The resulting mesoporous film has a dielectric constant less than 3, which is stable in moist air with a specific humidity. The present invention provides a method for superior control of film thickness and thickness uniformity over a coated wafer, and films with low dielectric constant.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2001},
month = {12}
}
Works referenced in this record:
Synthesis of a Stable Hexagonally Packed Mesoporous Niobium Oxide Molecular Sieve Through a Novel Ligand-Assisted Templating Mechanism
journal, March 1996
- Antonelli, David M.; Ying, Jackie Y.
- Angewandte Chemie International Edition in English, Vol. 35, Issue 4
Templating of Mesoporous Molecular Sieves by Nonionic Polyethylene Oxide Surfactants
journal, September 1995
- Bagshaw, S. A.; Prouzet, E.; Pinnavaia, T. J.
- Science, Vol. 269, Issue 5228
A Neutral Templating Route to Mesoporous Molecular Sieves
journal, February 1995
- Tanev, P. T.; Pinnavaia, T. J.
- Science, Vol. 267, Issue 5199, p. 865-867
A new family of mesoporous molecular sieves prepared with liquid crystal templates
journal, December 1992
- Beck, J. S.; Vartuli, J. C.; Roth, W. J.
- Journal of the American Chemical Society, Vol. 114, Issue 27, p. 10834-10843
Recent advances in the synthesis, characterization and applications of mesoporous molecular sieves
journal, February 1996
- Beck, Jeffrey S.; Vartuli, James C.
- Current Opinion in Solid State and Materials Science, Vol. 1, Issue 1
Cooperative organization of inorganic-surfactant and biomimetic assemblies
journal, February 1995
- Firouzi, A.; Kumar, D.; Bull, L.
- Science, Vol. 267, Issue 5201
Synthesis of hybrid inorganic–organic mesoporous silica by co-condensation of siloxane and organosiloxane precursors
journal, January 1996
- Burkett, Sandra L.; Sims, Stephen D.; Mann, Stephen
- Chem. Commun., Issue 11
Ordered mesoporous molecular sieves synthesized by a liquid-crystal template mechanism
journal, October 1992
- Kresge, C. T.; Leonowicz, M. E.; Roth, W. J.
- Nature, Vol. 359, Issue 6397, p. 710-712
Organization of Organic Molecules with Inorganic Molecular Species into Nanocomposite Biphase Arrays
journal, August 1994
- Huo, Qisheng; Margolese, David I.; Ciesla, Ulrike
- Chemistry of Materials, Vol. 6, Issue 8
Mesoporous Silica Molecular Sieves Prepared by Ionic and Neutral Surfactant Templating: A Comparison of Physical Properties
journal, January 1996
- Tanev, Peter T.; Pinnavaia, Thomas J.
- Chemistry of Materials, Vol. 8, Issue 8
Formation of a Porous Zirconium Oxo Phosphate with a High Surface Area by a Surfactant-Assisted Synthesis
journal, March 1996
- Ciesla, Ulrike; Schacht, Stefan; Stucky, Galen D.
- Angewandte Chemie International Edition in English, Vol. 35, Issue 5
Synthesis and Characterization of Hexagonally Packed Mesoporous Tantalum Oxide Molecular Sieves
journal, January 1996
- Antonelli, David M.; Ying, Jackie Y.
- Chemistry of Materials, Vol. 8, Issue 4, p. 874-881
Free-standing and oriented mesoporous silica films grown at the air–water interface
journal, June 1996
- Yang, Hong; Coombs, Neil; Sokolov, Igor
- Nature, Vol. 381, Issue 6583