Light-induced voltage alteration for integrated circuit analysis

Soden, Jerry M

Title: Light-induced voltage alteration for integrated circuit analysis

Abstract

An apparatus and method are described for analyzing an integrated circuit (IC), The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC, The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs.

Inventors:

Cole, Jr., Edward I. ^[1]; Soden, Jerry M ^[2]

(Albuquerque, NM)
Placitas, NM

Issue Date:: 1995-01-01

Research Org.:: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

OSTI Identifier:: 869963

Patent Number(s):: 5430305

Assignee:: United States of America as represented by United States (Washington, DC)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01R - MEASURING ELECTRIC VARIABLES

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G - PHYSICS G01 - MEASURING G01R - MEASURING ELECTRIC VARIABLES
G01R31/311 - of integrated circuits {

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DOE Contract Number:: AC04-94AL85000

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: light-induced; voltage; alteration; integrated; circuit; analysis; apparatus; method; described; analyzing; focused; light; beam; scanned; surface; generate; liva; signal; image; location; defects; control; logic; failure; ics; production-line; inspection; qualification; voltage alteration; light beam; integrated circuit; failure analysis; circuit analysis; /250/

Citation Formats


                    Cole, Jr., Edward I., and Soden, Jerry M. Light-induced voltage alteration for integrated circuit analysis.  United States: N. p., 1995. 
        Web.

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                    Cole, Jr., Edward I., & Soden, Jerry M. Light-induced voltage alteration for integrated circuit analysis.  United States.

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                    Cole, Jr., Edward I., and Soden, Jerry M. Sun .  
        "Light-induced voltage alteration for integrated circuit analysis".  United States.  https://www.osti.gov/servlets/purl/869963.

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@article{osti_869963,

  title        = {Light-induced voltage alteration for integrated circuit analysis},

  author       = {Cole, Jr., Edward I. and Soden, Jerry M},

  abstractNote = {An apparatus and method are described for analyzing an integrated circuit (IC), The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC, The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {1995},

  month        = {1}

}

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Works referenced in this record:

IC failure analysis: techniques and tools for quality reliability improvement
journal, May 1993

Soden, J. M.; Anderson, R. E.
Proceedings of the IEEE, Vol. 81, Issue 5
https://doi.org/10.1109/5.220902

Logic Failure Analysis of CMOS VLSI using a Laser Probe
conference, April 1984

Henley, F. J.
22nd International Reliability Physics Symposium
https://doi.org/10.1109/IRPS.1984.362022

Detection and localization of gate oxide shorts in MOS transistors by optical-beam-induced current
journal, January 1991

Zanoni, E.; Spiazzi, G.; Dalla Libera, G.
IEEE Transactions on Electron Devices, Vol. 38, Issue 2
https://doi.org/10.1109/16.69925

Novel failure analysis techniques using photon probing with a scanning optical microscope
conference, January 1994

Cole, E. I.; Soden, J. M.; Rife, J. L.
Proceedings of 1994 IEEE International Reliability Physics Symposium
https://doi.org/10.1109/RELPHY.1994.307808

Rapid localization of IC open conductors using charge-induced voltage alteration (CIVA)
conference, January 1992

Cole, E. I.; Anderson, R. E.
30th Annual Proceedings Reliability Physics 1992
https://doi.org/10.1109/RELPHY.1992.187659

Imaging Latch-Up Sites in LSI CMOS with a Laser Photoscanner
conference, April 1983

Burns, Daniel J.; Kendall, Jeffrey M.
21st International Reliability Physics Symposium
https://doi.org/10.1109/IRPS.1983.361971

Laser scanning of MOS IC's reveals internal logic states nondestructively
journal, January 1976

Sawyer, D. E.; Berning, D. W.
Proceedings of the IEEE, Vol. 64, Issue 3
https://doi.org/10.1109/PROC.1976.10140

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Title: Light-induced voltage alteration for integrated circuit analysis

Abstract

Citation Formats

IC failure analysis: techniques and tools for quality reliability improvement journal, May 1993

Logic Failure Analysis of CMOS VLSI using a Laser Probe conference, April 1984

Detection and localization of gate oxide shorts in MOS transistors by optical-beam-induced current journal, January 1991

Novel failure analysis techniques using photon probing with a scanning optical microscope conference, January 1994

Rapid localization of IC open conductors using charge-induced voltage alteration (CIVA) conference, January 1992

Imaging Latch-Up Sites in LSI CMOS with a Laser Photoscanner conference, April 1983

Laser scanning of MOS IC's reveals internal logic states nondestructively journal, January 1976

IC failure analysis: techniques and tools for quality reliability improvement
journal, May 1993

Logic Failure Analysis of CMOS VLSI using a Laser Probe
conference, April 1984

Detection and localization of gate oxide shorts in MOS transistors by optical-beam-induced current
journal, January 1991

Novel failure analysis techniques using photon probing with a scanning optical microscope
conference, January 1994

Rapid localization of IC open conductors using charge-induced voltage alteration (CIVA)
conference, January 1992

Imaging Latch-Up Sites in LSI CMOS with a Laser Photoscanner
conference, April 1983

Laser scanning of MOS IC's reveals internal logic states nondestructively
journal, January 1976