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Title: Light-induced voltage alteration for integrated circuit analysis

Abstract

An apparatus and method are described for analyzing an integrated circuit (IC), The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC, The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs.

Inventors:
 [1];  [2]
  1. (Albuquerque, NM)
  2. Placitas, NM
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
OSTI Identifier:
869963
Patent Number(s):
5430305
Assignee:
United States of America as represented by United States (Washington, DC)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01R - MEASURING ELECTRIC VARIABLES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
light-induced; voltage; alteration; integrated; circuit; analysis; apparatus; method; described; analyzing; focused; light; beam; scanned; surface; generate; liva; signal; image; location; defects; control; logic; failure; ics; production-line; inspection; qualification; voltage alteration; light beam; integrated circuit; failure analysis; circuit analysis; /250/

Citation Formats

Cole, Jr., Edward I., and Soden, Jerry M. Light-induced voltage alteration for integrated circuit analysis. United States: N. p., 1995. Web.
Cole, Jr., Edward I., & Soden, Jerry M. Light-induced voltage alteration for integrated circuit analysis. United States.
Cole, Jr., Edward I., and Soden, Jerry M. Sun . "Light-induced voltage alteration for integrated circuit analysis". United States. https://www.osti.gov/servlets/purl/869963.
@article{osti_869963,
title = {Light-induced voltage alteration for integrated circuit analysis},
author = {Cole, Jr., Edward I. and Soden, Jerry M},
abstractNote = {An apparatus and method are described for analyzing an integrated circuit (IC), The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC, The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

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Works referenced in this record:

IC failure analysis: techniques and tools for quality reliability improvement
journal, May 1993


Logic Failure Analysis of CMOS VLSI using a Laser Probe
conference, April 1984


Detection and localization of gate oxide shorts in MOS transistors by optical-beam-induced current
journal, January 1991


Novel failure analysis techniques using photon probing with a scanning optical microscope
conference, January 1994


Rapid localization of IC open conductors using charge-induced voltage alteration (CIVA)
conference, January 1992


Imaging Latch-Up Sites in LSI CMOS with a Laser Photoscanner
conference, April 1983


Laser scanning of MOS IC's reveals internal logic states nondestructively
journal, January 1976