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Title: Light-induced voltage alteration for integrated circuit analysis

Abstract

An apparatus and method are described for analyzing an integrated circuit (IC), The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC, The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs.

Inventors:
 [1];  [2]
  1. (Albuquerque, NM)
  2. (Placitas, NM)
Issue Date:
Research Org.:
SANDIA CORP
OSTI Identifier:
869963
Patent Number(s):
5430305
Assignee:
United States of America as represented by United States (Washington, DC) SNL
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
light-induced; voltage; alteration; integrated; circuit; analysis; apparatus; method; described; analyzing; focused; light; beam; scanned; surface; generate; liva; signal; image; location; defects; control; logic; failure; ics; production-line; inspection; qualification; voltage alteration; light beam; integrated circuit; failure analysis; circuit analysis; /250/

Citation Formats

Cole, Jr., Edward I., and Soden, Jerry M. Light-induced voltage alteration for integrated circuit analysis. United States: N. p., 1995. Web.
Cole, Jr., Edward I., & Soden, Jerry M. Light-induced voltage alteration for integrated circuit analysis. United States.
Cole, Jr., Edward I., and Soden, Jerry M. Sun . "Light-induced voltage alteration for integrated circuit analysis". United States. https://www.osti.gov/servlets/purl/869963.
@article{osti_869963,
title = {Light-induced voltage alteration for integrated circuit analysis},
author = {Cole, Jr., Edward I. and Soden, Jerry M.},
abstractNote = {An apparatus and method are described for analyzing an integrated circuit (IC), The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC, The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {1}
}

Patent:

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