Light-induced voltage alteration for integrated circuit analysis
Abstract
An apparatus and method are described for analyzing an integrated circuit (IC). The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC. The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs. 18 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- OSTI Identifier:
- 87724
- Patent Number(s):
- 5430305
- Application Number:
- PAN: 8-225,021
- Assignee:
- Dept. of Energy, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 4 Jul 1995
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; INTEGRATED CIRCUITS; DIAGNOSTIC TECHNIQUES; EQUIPMENT; DESIGN; VISIBLE RADIATION; ELECTRIC POTENTIAL; USES
Citation Formats
Cole, Jr, E I, and Soden, J M. Light-induced voltage alteration for integrated circuit analysis. United States: N. p., 1995.
Web.
Cole, Jr, E I, & Soden, J M. Light-induced voltage alteration for integrated circuit analysis. United States.
Cole, Jr, E I, and Soden, J M. Tue .
"Light-induced voltage alteration for integrated circuit analysis". United States.
@article{osti_87724,
title = {Light-induced voltage alteration for integrated circuit analysis},
author = {Cole, Jr, E I and Soden, J M},
abstractNote = {An apparatus and method are described for analyzing an integrated circuit (IC). The invention uses a focused light beam that is scanned over a surface of the IC to generate a light-induced voltage alteration (LIVA) signal for analysis of the IC. The LIVA signal may be used to generate an image of the IC showing the location of any defects in the IC; and it may be further used to image and control the logic states of the IC. The invention has uses for IC failure analysis, for the development of ICs, for production-line inspection of ICs, and for qualification of ICs. 18 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 04 00:00:00 EDT 1995},
month = {Tue Jul 04 00:00:00 EDT 1995}
}
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