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Title: Reflection soft X-ray microscope and method

Abstract

A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.

Inventors:
 [1];  [2];  [1]
  1. Princeton, NJ
  2. Lawrenceville, NJ
Issue Date:
Research Org.:
Princeton Plasma Physics Lab. (PPPL), Princeton, NJ (United States)
OSTI Identifier:
868629
Patent Number(s):
5177774
Assignee:
Trustees of Princeton University (Princeton, NJ)
Patent Classifications (CPCs):
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
DOE Contract Number:  
AC02-76CH03073
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
reflection; soft; x-ray; microscope; method; provided; generating; beams; condensing; strike; surface; predetermined; angle; focusing; reflected; detector; recording; image; near; features; observation; x-ray beams; surface feature; surface features; near surface; x-ray beam; soft x-ray; predetermined angle; x-ray microscope; reflection soft; ray beams; /378/

Citation Formats

Suckewer, Szymon, Skinner, Charles H, and Rosser, Roy. Reflection soft X-ray microscope and method. United States: N. p., 1993. Web.
Suckewer, Szymon, Skinner, Charles H, & Rosser, Roy. Reflection soft X-ray microscope and method. United States.
Suckewer, Szymon, Skinner, Charles H, and Rosser, Roy. Fri . "Reflection soft X-ray microscope and method". United States. https://www.osti.gov/servlets/purl/868629.
@article{osti_868629,
title = {Reflection soft X-ray microscope and method},
author = {Suckewer, Szymon and Skinner, Charles H and Rosser, Roy},
abstractNote = {A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}

Patent:

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