skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Reflection soft X-ray microscope and method

Abstract

A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.

Inventors:
; ;
Issue Date:
OSTI Identifier:
6036473
Patent Number(s):
5177774
Application Number:
PPN: US 7-749277
Assignee:
Princeton Univ., NJ (United States)
DOE Contract Number:  
AC02-76CH03073
Resource Type:
Patent
Resource Relation:
Patent File Date: 23 Aug 1991
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; MICROSCOPES; DESIGN; FOCUSING; IMAGES; OPERATION; REFLECTION; SOFT X RADIATION; SURFACES; X-RAY DETECTION; DETECTION; ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; RADIATION DETECTION; RADIATIONS; X RADIATION; 440600* - Optical Instrumentation- (1990-)

Citation Formats

Suckewer, S, Skinner, C H, and Rosser, R. Reflection soft X-ray microscope and method. United States: N. p., 1993. Web.
Suckewer, S, Skinner, C H, & Rosser, R. Reflection soft X-ray microscope and method. United States.
Suckewer, S, Skinner, C H, and Rosser, R. Tue . "Reflection soft X-ray microscope and method". United States.
@article{osti_6036473,
title = {Reflection soft X-ray microscope and method},
author = {Suckewer, S and Skinner, C H and Rosser, R},
abstractNote = {A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}