Reflection soft X-ray microscope and method
Abstract
A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.
- Inventors:
- Issue Date:
- OSTI Identifier:
- 6036473
- Patent Number(s):
- 5177774
- Application Number:
- PPN: US 7-749277
- Assignee:
- Princeton Univ., NJ (United States)
- DOE Contract Number:
- AC02-76CH03073
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 23 Aug 1991
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; MICROSCOPES; DESIGN; FOCUSING; IMAGES; OPERATION; REFLECTION; SOFT X RADIATION; SURFACES; X-RAY DETECTION; DETECTION; ELECTROMAGNETIC RADIATION; IONIZING RADIATIONS; RADIATION DETECTION; RADIATIONS; X RADIATION; 440600* - Optical Instrumentation- (1990-)
Citation Formats
Suckewer, S, Skinner, C H, and Rosser, R. Reflection soft X-ray microscope and method. United States: N. p., 1993.
Web.
Suckewer, S, Skinner, C H, & Rosser, R. Reflection soft X-ray microscope and method. United States.
Suckewer, S, Skinner, C H, and Rosser, R. Tue .
"Reflection soft X-ray microscope and method". United States.
@article{osti_6036473,
title = {Reflection soft X-ray microscope and method},
author = {Suckewer, S and Skinner, C H and Rosser, R},
abstractNote = {A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1993},
month = {1}
}
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