High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes

Zaluzec, Nestor J.

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Title: High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes

Abstract

An X-ray spectrometer systems and methods are provided for implementing signal detection for use on electron-optical beam lines and microscopes. The X-ray Spectrometer System (XSS) includes an X-ray detector (XD) measuring the X-ray signal and positioned proximate to a specimen. An environmental isolation window together with an electron beam stop is disposed between XD and the specimen. The environmental isolation window and the electron beam stop protect XD from electrons directly transmitted through the specimen. An electron detector is located between the electron beam stop and the specimen allowing the measurement of scattered electrons. The XD measures an X-ray signal in the X-ray spectrometer system.

Inventors:: Zaluzec, Nestor J.

Issue Date:: Tue Nov 20 00:00:00 EST 2012

Research Org.:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531771

Patent Number(s):: 8314386

Application Number:: 13/041,265

Assignee:: UChicago Argonne, LLC (Chicago, IL)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

Show more

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/164 - Particle-permeable windows
H01J2237/2442 - Energy-dispersive
H01J2237/24455 - Transmitted particle detectors
H01J2237/24465 - Sectored detectors, e.g. quadrants
H01J2237/2807 - X-rays
H01J37/244 - Detectors
H01J37/26 - Electron or ion microscopes

Show less

DOE Contract Number:: AC02-06CH11357; W-31-109-ENG-38

Resource Type:: Patent

Resource Relation:: Patent File Date: 2011-03-04

Country of Publication:: United States

Language:: English

Subject:: 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY

Citation Formats


                    Zaluzec, Nestor J. High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes.  United States: N. p., 2012. 
        Web.

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                    Zaluzec, Nestor J. High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes.  United States.

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                    Zaluzec, Nestor J. Tue .  
        "High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes".  United States.  https://www.osti.gov/servlets/purl/1531771.

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@article{osti_1531771,

  title        = {High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes},

  author       = {Zaluzec, Nestor J.},

  abstractNote = {An X-ray spectrometer systems and methods are provided for implementing signal detection for use on electron-optical beam lines and microscopes. The X-ray Spectrometer System (XSS) includes an X-ray detector (XD) measuring the X-ray signal and positioned proximate to a specimen. An environmental isolation window together with an electron beam stop is disposed between XD and the specimen. The environmental isolation window and the electron beam stop protect XD from electrons directly transmitted through the specimen. An electron detector is located between the electron beam stop and the specimen allowing the measurement of scattered electrons. The XD measures an X-ray signal in the X-ray spectrometer system.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Nov 20 00:00:00 EST 2012},

  month        = {Tue Nov 20 00:00:00 EST 2012}

}

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Works referencing / citing this record:

Charged-particle lens that transmits emissions from sample
patent, May 2016

Parker, N. William; Straw, Marcus; Filevich, Jorge
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Similar Records

Title: High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes

Abstract

Citation Formats

Energy dispersive X-ray spectrometer patent, November 1991

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope patent, April 2012

Louvered beam stop for lowering x-ray limit of a total pressure gauge patent, November 2002

Simultaneous specimen and stage cleaning device for analytical electron microscope patent, April 1996

Semiconductor radiation detector patent, September 2002

Method and Apparatus for Observing Inside Structures, and Specimen Holder patent-application, December 2009

Electron microscope patent, November 1993

Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes patent, June 2002

Material characterization system patent-application, September 2004

Electron Microanalyzer patent, March 1945

Electron microscope having X-ray detector patent, March 1990

Electron beam stop analyzer patent, February 1998

Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method patent, September 2004

Radiation window and method of manufacture patent, April 2006

Electron microscope patent, February 1994

Motorized Manipulator for Positioning a TEM Specimen patent-application, June 2009

Scanning confocal electron microscope patent-application, February 2003

Thin Walled Tube Radiator for Bremsstrahlung at High Electron Beam Intensities patent-application, December 2008

Arrangement for Three-Dimensional Electron Beam Tomography patent-application, December 2010

Electron Microscopes patent, December 1975

Energy dispersive semiconductor X-ray detector with improved silicon detector patent, November 2000

Image reconstruction methods patent, July 1997

Pileup Rejection in an Energy-Dispersive Radiation Spectrometry System patent-application, February 2009

Scanning Electron Microscope patent, June 1965

X-ray diagnostic apparatus patent, July 2002

Method and Apparatus for Observing Inside Structures and Specimen Holder patent-application, November 2007

Data reduction system for real time monitoring of radiation machinery patent, June 1997

Sccanning Electron Microscope, an Interface and a Method for Observing an Object Within a Non-Vacuum Environment patent-application, July 2011

Gas-filled X-ray detector patent, September 1989

Energy dispersive X-ray analyzer patent, May 1999

Scanning confocal electron microscope patent, April 2003

Interface a Method for Observing an Object Within a Non-Vacuum Environment and a Scanning Electron Microscope patent-application, June 2010

Scanning transmission electron microscope patent, July 1978

Mechanical shutter for protecting an x-ray detector against high-energy electron or x-ray damage patent, October 1996

Electronic Microscope Apparatus patent-application, August 2009

X-Ray Tube and X-Ray Analyzing Apparatus patent-application, July 2008

Radiation detector system having heat pipe based cooling patent, October 2006

Charged-particle lens that transmits emissions from sample patent, May 2016

Energy dispersive X-ray spectrometer
patent, November 1991

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
patent, April 2012

Louvered beam stop for lowering x-ray limit of a total pressure gauge
patent, November 2002

Simultaneous specimen and stage cleaning device for analytical electron microscope
patent, April 1996

Semiconductor radiation detector
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Method and Apparatus for Observing Inside Structures, and Specimen Holder
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Electron microscope
patent, November 1993

Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes
patent, June 2002

Material characterization system
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Electron Microanalyzer
patent, March 1945

Electron microscope having X-ray detector
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Electron beam stop analyzer
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Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method
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Radiation window and method of manufacture
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Electron microscope
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Motorized Manipulator for Positioning a TEM Specimen
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Scanning confocal electron microscope
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Thin Walled Tube Radiator for Bremsstrahlung at High Electron Beam Intensities
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Arrangement for Three-Dimensional Electron Beam Tomography
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Energy dispersive semiconductor X-ray detector with improved silicon detector
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Image reconstruction methods
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Pileup Rejection in an Energy-Dispersive Radiation Spectrometry System
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Scanning Electron Microscope
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X-ray diagnostic apparatus
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Method and Apparatus for Observing Inside Structures and Specimen Holder
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Data reduction system for real time monitoring of radiation machinery
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Sccanning Electron Microscope, an Interface and a Method for Observing an Object Within a Non-Vacuum Environment
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Gas-filled X-ray detector
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Energy dispersive X-ray analyzer
patent, May 1999

Scanning confocal electron microscope
patent, April 2003

Interface a Method for Observing an Object Within a Non-Vacuum Environment and a Scanning Electron Microscope
patent-application, June 2010

Scanning transmission electron microscope
patent, July 1978

Mechanical shutter for protecting an x-ray detector against high-energy electron or x-ray damage
patent, October 1996

Electronic Microscope Apparatus
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X-Ray Tube and X-Ray Analyzing Apparatus
patent-application, July 2008

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