Reflection soft X-ray microscope and method
Abstract
A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.
- Inventors:
-
- Princeton, NJ
- Lawrenceville, NJ
- Issue Date:
- Research Org.:
- Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)
- OSTI Identifier:
- 868629
- Patent Number(s):
- 5177774
- Assignee:
- Trustees of Princeton University (Princeton, NJ)
- Patent Classifications (CPCs):
-
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
- DOE Contract Number:
- AC02-76CH03073
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- reflection; soft; x-ray; microscope; method; provided; generating; beams; condensing; strike; surface; predetermined; angle; focusing; reflected; detector; recording; image; near; features; observation; x-ray beams; surface feature; surface features; near surface; x-ray beam; soft x-ray; predetermined angle; x-ray microscope; reflection soft; ray beams; /378/
Citation Formats
Suckewer, Szymon, Skinner, Charles H, and Rosser, Roy. Reflection soft X-ray microscope and method. United States: N. p., 1993.
Web.
Suckewer, Szymon, Skinner, Charles H, & Rosser, Roy. Reflection soft X-ray microscope and method. United States.
Suckewer, Szymon, Skinner, Charles H, and Rosser, Roy. Fri .
"Reflection soft X-ray microscope and method". United States. https://www.osti.gov/servlets/purl/868629.
@article{osti_868629,
title = {Reflection soft X-ray microscope and method},
author = {Suckewer, Szymon and Skinner, Charles H and Rosser, Roy},
abstractNote = {A reflection soft X-ray microscope is provided by generating soft X-ray beams, condensing the X-ray beams to strike a surface of an object at a predetermined angle, and focusing the X-ray beams reflected from the surface onto a detector, for recording an image of the surface or near surface features of the object under observation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 1993},
month = {Fri Jan 01 00:00:00 EST 1993}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
X-Ray Microscopes
journal, February 1991
- Howells, Malcolm R.; Kirz, Janos; Sayre, David
- Scientific American, Vol. 264, Issue 2
Contact microscopy with a soft X-ray laser
journal, July 1990
- Skinner, C. H.; DiCicco, D. S.; Kim, D.
- Journal of Microscopy, Vol. 159, Issue 1