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Title: X-ray laser microscope apparatus

Abstract

A microscope consisting of an x-ray contact microscope and an optical microscope. The optical, phase contrast, microscope is used to align a target with respect to a source of soft x-rays. The source of soft x-rays preferably comprises an x-ray laser but could comprise a synchrotron or other pulse source of x-rays. Transparent resist material is used to support the target. The optical microscope is located on the opposite side of the transparent resist material from the target and is employed to align the target with respect to the anticipated soft x-ray laser beam. After alignment with the use of the optical microscope, the target is exposed to the soft x-ray laser beam. The x-ray sensitive transparent resist material whose chemical bonds are altered by the x-ray beam passing through the target mater GOVERNMENT LICENSE RIGHTS This invention was made with government support under Contract No. De-FG02-86ER13609 awarded by the Department of Energy. The Government has certain rights in this invention.

Inventors:
 [1];  [2];  [3];  [4];  [1];  [5]
  1. Princeton, NJ
  2. Plainsboro, NJ
  3. Coral Gables, FL
  4. East Windsor, NJ
  5. Lawrenceville, NJ
Issue Date:
Research Org.:
Princeton X-Ray Laser (Monmouth Junction, NJ)
OSTI Identifier:
867655
Patent Number(s):
4979203
Assignee:
Princeton X-Ray Laser (Monmouth Junction, NJ)
DOE Contract Number:  
FG02-86ER13609
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
x-ray; laser; microscope; apparatus; consisting; contact; optical; phase; contrast; align; target; respect; source; soft; x-rays; preferably; comprises; comprise; synchrotron; pulse; transparent; resist; material; support; located; opposite; employed; anticipated; beam; alignment; exposed; sensitive; chemical; bonds; altered; passing; mater; government; license; rights; contract; de-fg02-86er13609; awarded; department; energy; optical microscope; chemical bond; resist material; beam passing; x-ray beam; x-ray laser; laser beam; preferably comprises; soft x-ray; government support; pulse source; x-ray sensitive; soft x-rays; laser microscope; microscope apparatus; target mater; ray sensitive; preferably comprise; /378/

Citation Formats

Suckewer, Szymon, DiCicco, Darrell S, Hirschberg, Joseph G, Meixler, Lewis D, Sathre, Robert, and Skinner, Charles H. X-ray laser microscope apparatus. United States: N. p., 1990. Web.
Suckewer, Szymon, DiCicco, Darrell S, Hirschberg, Joseph G, Meixler, Lewis D, Sathre, Robert, & Skinner, Charles H. X-ray laser microscope apparatus. United States.
Suckewer, Szymon, DiCicco, Darrell S, Hirschberg, Joseph G, Meixler, Lewis D, Sathre, Robert, and Skinner, Charles H. Mon . "X-ray laser microscope apparatus". United States. https://www.osti.gov/servlets/purl/867655.
@article{osti_867655,
title = {X-ray laser microscope apparatus},
author = {Suckewer, Szymon and DiCicco, Darrell S and Hirschberg, Joseph G and Meixler, Lewis D and Sathre, Robert and Skinner, Charles H},
abstractNote = {A microscope consisting of an x-ray contact microscope and an optical microscope. The optical, phase contrast, microscope is used to align a target with respect to a source of soft x-rays. The source of soft x-rays preferably comprises an x-ray laser but could comprise a synchrotron or other pulse source of x-rays. Transparent resist material is used to support the target. The optical microscope is located on the opposite side of the transparent resist material from the target and is employed to align the target with respect to the anticipated soft x-ray laser beam. After alignment with the use of the optical microscope, the target is exposed to the soft x-ray laser beam. The x-ray sensitive transparent resist material whose chemical bonds are altered by the x-ray beam passing through the target mater GOVERNMENT LICENSE RIGHTS This invention was made with government support under Contract No. De-FG02-86ER13609 awarded by the Department of Energy. The Government has certain rights in this invention.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1990},
month = {1}
}

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