X-ray laser microscope apparatus
Abstract
A microscope consisting of an x-ray contact microscope and an optical microscope. The optical, phase contrast, microscope is used to align a target with respect to a source of soft x-rays. The source of soft x-rays preferably comprises an x-ray laser but could comprise a synchrotron or other pulse source of x-rays. Transparent resist material is used to support the target. The optical microscope is located on the opposite side of the transparent resist material from the target and is employed to align the target with respect to the anticipated soft x-ray laser beam. After alignment with the use of the optical microscope, the target is exposed to the soft x-ray laser beam. The x-ray sensitive transparent resist material whose chemical bonds are altered by the x-ray beam passing through the target mater GOVERNMENT LICENSE RIGHTS This invention was made with government support under Contract No. De-FG02-86ER13609 awarded by the Department of Energy. The Government has certain rights in this invention.
- Inventors:
- Issue Date:
- Research Org.:
- Princeton X-Ray Laser, Monmouth Junction, NJ (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 867655
- Patent Number(s):
- 4979203
- Application Number:
- 07/369,206
- Assignee:
- Princeton X-Ray Laser (Monmouth Junction, NJ)
- Patent Classifications (CPCs):
-
A - HUMAN NECESSITIES A61 - MEDICAL OR VETERINARY SCIENCE A61B - DIAGNOSIS
G - PHYSICS G21 - NUCLEAR PHYSICS G21K - TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR
- DOE Contract Number:
- FG02-86ER13609
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 1989 Jun 19
- Country of Publication:
- United States
- Language:
- English
- Subject:
- /378/
Citation Formats
Suckewer, Szymon, DiCicco, Darrell S., Hirschberg, Joseph G., Meixler, Lewis D., Sathre, Robert, and Skinner, Charles H. X-ray laser microscope apparatus. United States: N. p., 1990.
Web.
Suckewer, Szymon, DiCicco, Darrell S., Hirschberg, Joseph G., Meixler, Lewis D., Sathre, Robert, & Skinner, Charles H. X-ray laser microscope apparatus. United States.
Suckewer, Szymon, DiCicco, Darrell S., Hirschberg, Joseph G., Meixler, Lewis D., Sathre, Robert, and Skinner, Charles H. Mon .
"X-ray laser microscope apparatus". United States. https://www.osti.gov/servlets/purl/867655.
@article{osti_867655,
title = {X-ray laser microscope apparatus},
author = {Suckewer, Szymon and DiCicco, Darrell S. and Hirschberg, Joseph G. and Meixler, Lewis D. and Sathre, Robert and Skinner, Charles H.},
abstractNote = {A microscope consisting of an x-ray contact microscope and an optical microscope. The optical, phase contrast, microscope is used to align a target with respect to a source of soft x-rays. The source of soft x-rays preferably comprises an x-ray laser but could comprise a synchrotron or other pulse source of x-rays. Transparent resist material is used to support the target. The optical microscope is located on the opposite side of the transparent resist material from the target and is employed to align the target with respect to the anticipated soft x-ray laser beam. After alignment with the use of the optical microscope, the target is exposed to the soft x-ray laser beam. The x-ray sensitive transparent resist material whose chemical bonds are altered by the x-ray beam passing through the target mater GOVERNMENT LICENSE RIGHTS This invention was made with government support under Contract No. De-FG02-86ER13609 awarded by the Department of Energy. The Government has certain rights in this invention.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1990},
month = {1}
}