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Title: Method for making defect-free zone by laser-annealing of doped silicon

Abstract

This invention is a method for improving the electrical properties of silicon semiconductor material. The method comprises irradiating a selected surface layer of the semiconductor material with high-power laser pulses characterized by a special combination of wavelength, energy level, and duration. The combination effects melting of the layer without degrading electrical properties, such as minority-carrier diffusion length. The method is applicable to improving the electrical properties of n- and p-type silicon which is to be doped to form an electrical junction therein. Another important application of the method is the virtually complete removal of doping-induced defects from ion-implanted or diffusion-doped silicon substrates.

Inventors:
 [1];  [2];  [1]
  1. (Knoxville, TN)
  2. (Oak Ridge, TN)
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN
OSTI Identifier:
863479
Patent Number(s):
4181538
Assignee:
United States of America as represented by United States (Washington, DC) ORNL
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
method; defect-free; zone; laser-annealing; doped; silicon; improving; electrical; properties; semiconductor; material; comprises; irradiating; selected; surface; layer; high-power; laser; pulses; characterized; special; combination; wavelength; energy; level; duration; effects; melting; degrading; minority-carrier; diffusion; length; applicable; n-; p-type; form; junction; therein; application; virtually; complete; removal; doping-induced; defects; ion-implanted; diffusion-doped; substrates; selected surface; high-power laser; carrier diffusion; silicon substrates; diffusion length; energy level; laser pulses; method comprises; laser pulse; semiconductor material; silicon substrate; surface layer; electrical properties; power laser; doped silicon; method comprise; complete removal; silicon semiconductor; comprises irradiating; virtually complete; electrical junction; junction therein; /438/136/148/219/257/

Citation Formats

Narayan, Jagdish, White, Clark W., and Young, Rosa T. Method for making defect-free zone by laser-annealing of doped silicon. United States: N. p., 1980. Web.
Narayan, Jagdish, White, Clark W., & Young, Rosa T. Method for making defect-free zone by laser-annealing of doped silicon. United States.
Narayan, Jagdish, White, Clark W., and Young, Rosa T. Tue . "Method for making defect-free zone by laser-annealing of doped silicon". United States. https://www.osti.gov/servlets/purl/863479.
@article{osti_863479,
title = {Method for making defect-free zone by laser-annealing of doped silicon},
author = {Narayan, Jagdish and White, Clark W. and Young, Rosa T.},
abstractNote = {This invention is a method for improving the electrical properties of silicon semiconductor material. The method comprises irradiating a selected surface layer of the semiconductor material with high-power laser pulses characterized by a special combination of wavelength, energy level, and duration. The combination effects melting of the layer without degrading electrical properties, such as minority-carrier diffusion length. The method is applicable to improving the electrical properties of n- and p-type silicon which is to be doped to form an electrical junction therein. Another important application of the method is the virtually complete removal of doping-induced defects from ion-implanted or diffusion-doped silicon substrates.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1980},
month = {1}
}

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