Nanostructured substrates for improved lift-off of III-V thin films

Chin, Alan; Ning, Cun-Zheng

Advanced Search OptionsAdvanced Search queries use a traditional Term Search. For more info, see our FAQ.

All Fields:

Patent Title:

Abstract:

Assignee:

Inventor(s):

Patent Number:

Patent Classification (CPC):

All Classifications
A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
A43 - footwear
A44 - haberdashery
A45 - hand or travelling articles
A46 - brushware
A47 - furniture
A61 - medical or veterinary science
A62 - life-saving
A63 - sports
A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
B07 - separating solids from solids
B08 - cleaning
B09 - disposal of solid waste
B21 - mechanical metal-working without essentially removing material
B22 - casting
B23 - machine tools
B24 - grinding
B25 - hand tools
B26 - hand cutting tools
B27 - working or preserving wood or similar material
B28 - working cement, clay, or stone
B29 - working of plastics
B30 - presses
B31 - making articles of paper, cardboard or material worked in a manner analogous to paper
B32 - layered products
B33 - additive manufacturing technology
B41 - printing
B42 - bookbinding
B43 - writing or drawing implements
B44 - decorative arts
B60 - vehicles in general
B61 - railways
B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
B64 - aircraft
B65 - conveying
B66 - hoisting
B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
B81 - microstructural technology
B82 - nanotechnology
B99 - subject matter not otherwise provided for in this section
C - chemistry
C01 - inorganic chemistry
C02 - treatment of water, waste water, sewage, or sludge
C03 - glass
C04 - cements
C05 - fertilisers
C06 - explosives
C07 - organic chemistry
C08 - organic macromolecular compounds
C09 - dyes
C10 - petroleum, gas or coke industries
C11 - animal or vegetable oils, fats, fatty substances or waxes
C12 - biochemistry
C13 - sugar industry
C14 - skins
C21 - metallurgy of iron
C22 - metallurgy
C23 - coating metallic material
C25 - electrolytic or electrophoretic processes
C30 - crystal growth
C40 - combinatorial technology
C99 - subject matter not otherwise provided for in this section
D - textiles
D01 - natural or man-made threads or fibres
D02 - yarns
D03 - weaving
D04 - braiding
D05 - sewing
D06 - treatment of textiles or the like
D07 - ropes
D10 - indexing scheme associated with sublasses of section d, relating to textiles
D21 - paper-making
D99 - subject matter not otherwise provided for in this section
E - fixed constructions
E01 - construction of roads, railways, or bridges
E02 - hydraulic engineering
E03 - water supply
E04 - building
E05 - locks
E06 - doors, windows, shutters, or roller blinds in general
E21 - earth drilling
E99 - subject matter not otherwise provided for in this section
F - mechanical engineering
F01 - machines or engines in general
F02 - combustion engines
F03 - machines or engines for liquids
F04 - positive - displacement machines for liquids
F05 - indexing schemes relating to engines or pumps in various subclasses of classes f01-f04
F15 - fluid-pressure actuators
F16 - engineering elements and units
F17 - storing or distributing gases or liquids
F21 - lighting
F22 - steam generation
F23 - combustion apparatus
F24 - heating
F25 - refrigeration or cooling
F26 - drying
F27 - furnaces
F28 - heat exchange in general
F41 - weapons
F42 - ammunition
F99 - subject matter not otherwise provided for in this section
G - physics
G01 - measuring
G02 - optics
G03 - photography
G04 - horology
G05 - controlling
G06 - computing
G07 - checking-devices
G08 - signalling
G09 - education
G10 - musical instruments
G11 - information storage
G12 - instrument details
G16 - information and communication technology [ict] specially adapted for specific application fields
G21 - nuclear physics
G99 - subject matter not otherwise provided for in this section
H - electricity
H01 - basic electric elements
H02 - generation
H03 - basic electronic circuitry
H04 - electric communication technique
H05 - electric techniques not otherwise provided for
H99 - subject matter not otherwise provided for in this section
Y - new / cross sectional technologies
Y02 - technologies or applications for mitigation or adaptation against climate change
Y04 - information or communication technologies having an impact on other technology areas
Y10 - technical subjects covered by former uspc

More Options ...

Title: Nanostructured substrates for improved lift-off of III-V thin films

Abstract

Reusable nanostructured substrates for forming semiconductor thin films, such as those used in solar cells, are configured with nanopillars to permit improved lift-off of thin films.

Inventors:: Chin, Alan; Ning, Cun-Zheng

Issue Date:: Tue Sep 03 00:00:00 EDT 2019

Research Org.:: Arizona State Univ., Scottsdale, AZ (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1576402

Patent Number(s):: 10403783

Application Number:: 16/261,027

Assignee:: Arizona Board of Regents on behalf of Arizona State University (Scottsdale, AZ)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

Show more

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/02381 - {Silicon, silicon germanium, germanium}
H01L21/02455 - {Group 13/15 materials}
H01L21/02513 - {Microstructure}
H01L21/02639 - {Preparation of substrate for selective deposition}
H01L21/0265 - {Pendeoepitaxy}
H01L21/3086 - {characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment}
H01L31/035281 - {Shape of the body}
H01L31/046 - PV modules composed of a plurality of thin film solar cells deposited on the same substrate
H01L31/184 - {the active layers comprising only AIIIBV compounds, e.g. GaAs, InP}
H01L31/1844 - {comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P}
H01L31/1896 - {for thin-film semiconductors}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/544 - Solar cells from Group III-V materials

Show less

DOE Contract Number:: EE0007369

Resource Type:: Patent

Resource Relation:: Patent File Date: 2019 Jan 29

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; 14 SOLAR ENERGY; 77 NANOSCIENCE AND NANOTECHNOLOGY; 42 ENGINEERING; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats


                    Chin, Alan, and Ning, Cun-Zheng. Nanostructured substrates for improved lift-off of III-V thin films.  United States: N. p., 2019. 
        Web.

Copy to clipboard


                    Chin, Alan, & Ning, Cun-Zheng. Nanostructured substrates for improved lift-off of III-V thin films.  United States.

Copy to clipboard


                    Chin, Alan, and Ning, Cun-Zheng. Tue .  
        "Nanostructured substrates for improved lift-off of III-V thin films".  United States.  https://www.osti.gov/servlets/purl/1576402.

Copy to clipboard


                    
@article{osti_1576402,

  title        = {Nanostructured substrates for improved lift-off of III-V thin films},

  author       = {Chin, Alan and Ning, Cun-Zheng},

  abstractNote = {Reusable nanostructured substrates for forming semiconductor thin films, such as those used in solar cells, are configured with nanopillars to permit improved lift-off of thin films.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Sep 03 00:00:00 EDT 2019},

  month        = {Tue Sep 03 00:00:00 EDT 2019}

}

Copy to clipboard

Patent:

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

Laterally varying II-VI alloys and uses thereof
patent, March 2017

Ning, Cun-Zheng; Pan, Anlian
US Patent Document 9,589,793
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9589793

Multi-bandgap semiconductor structures and methods for using them
patent, February 2016

Ning, Cun-Zheng; Liu, Zhicheng; Yin, Leijun
US Patent Document 9,267,076
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/9267076

Nanostructure, Photovoltaic Device, and Method of Fabrication Thereof
patent-application, August 2012

Fan, Zhiyong; Javey, Ali
US Patent Application 13/379455; 20120192934
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120192934

Laterally Arranged Multiple-Bandgap Solar Cells
patent-application, December 2012

Ning, Cun-Zheng; Caselli, Derek
US Patent Application 13/517823; 20120318324
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120318324

Method for Producing a Thin Single Crystal Silicon Having Large Surface Area
patent-application, June 2013

Lin, Ching-Fuh; Lin, Tzu-Ching; Syu, Shu-Jia
US Patent Application 13/414355; 20130143407
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130143407

Nanopillar Photonic Crystal Lasers
patent-application, September 2014

Scofield, Adam C.; Huffaker, Diana
US Patent Application 14/071283; 20140286367
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140286367

Two-Dimensional Photonic Bandgap Structures for Ultrahigh-Sensitivity Biosensing
patent-application, November 2010

Fauchet, Philippe M.; Lee, Mindy R.; Miller, Benjamin L.
US Patent Application 12/062202; 20100279886
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20100279886

Solar Cell
patent-application, June 2014

Watanabe, Keiji; Tsuchiya, Ryuta; Hattori, Takashi
US Patent Application 14/119195; 20140166100
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140166100

Nanowire Array Structures for Sensing, Solar Cell and Other Applications
patent-application, December 2012

Lal, Amit; Lu, Yuerui
US Patent Application 13/448384; 20120322164
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120322164

Methods of Providing Semiconductor Devices and Semiconductor Devices Thereof
patent-application, March 2018

Ning, Cun-Zheng; Turkdogan, Sunay; Liu, Zhicheng
US Patent Application 15/829551; 20180083064
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20180083064

Mass Production Method of Loading Radioisotopes into Radiovoltaics
patent-application, February 2017

Kwon, Jae Wan; Gahl, John Michel; Nullmeyer, Bradley Ryan
US Patent Application 15/302628; 20170032862
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20170032862

Heterojunction Wire Array Solar Cells
patent-application, August 2012

Tamboli, Adele; Turner-Evans, Daniel B.; Malhotra, Manav
US Patent Application 13/070337; 20120192939
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20120192939

Nanoshape Patterning Techniques that Allow High-Speed and Low-Cost Fabrication of Nanoshape Structures
patent-application, April 2016

Sreenivasan, Sidlgata V.; Cherala, Anshuman; Chopra, Meghali
US Patent Application 14/921866; 20160118249
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20160118249

Multi-Structure Pore Membrane and Pixel Structure
patent-application, May 2014

Hashimura, Akinori; Tweet, Douglas J.; Voutsas, Apostolos T.
US Patent Application 13/682535; 20140140054
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140140054

Methods for Sample Characterization
patent-application, December 2017

Alu, Andrea; Zhao, Yang
US Patent Application 15/520875; 20170356843
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20170356843

Superhydrophobic and Superoleophobic Nanosurfaces
patent-application, January 2014

Jin, Sungho; Choi, Chulmin
US Patent Application 13/996477; 20140011013
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20140011013

Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements
patent-application, December 2013

Nuzzo, Ralph G.; Rogers, John A.; Menard, Etienne
US Patent Application 13/801868; 20130320503
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20130320503

Similar Records in DOE Patents and OSTI.GOV collections:

Method of lift-off patterning thin films in situ employing phase change resists

Patent Bahlke, Matthias Erhard; Baldo, Marc A; Mendoza, Hiroshi Antonio

Method for making a patterned thin film of an organic semiconductor. The method includes condensing a resist gas into a solid film onto a substrate cooled to a temperature below the condensation point of the resist gas. The condensed solid film is heated selectively with a patterned stamp to cause local direct sublimation from solid to vapor of selected portions of the solid film thereby creating a patterned resist film. An organic semiconductor film is coated on the patterned resist film and the patterned resist film is heated to cause it to sublime away and to lift off because ofmore » the phase change. « less
Full Text Available
Nanostructures produced by phase-separation during growth of (III-V).sub.1-x(IV.sub.2).sub.x alloys

Patent Norman, Andrew G [Evergreen, CO]; Olson, Jerry M [Lakewood, CO]

Nanostructures (18) and methods for production thereof by phase separation during metal organic vapor-phase epitaxy (MOVPE). An embodiment of one of the methods may comprise providing a growth surface in a reaction chamber and introducing a first mixture of precursor materials into the reaction chamber to form a buffer layer (12) thereon. A second mixture of precursor materials may be provided into the reaction chamber to form an active region (14) on the buffer layer (12), wherein the nanostructure (18) is embedded in a matrix (16) in the active region (14). Additional steps are also disclosed for preparing the nanostructuremore » (18) product for various applications. « less
Full Text Available
Growth of single crystal III-V semiconductors on amorphous substrates

Patent Chen, Kevin; Kapadia, Rehan; Javey, Ali

This disclosure provides systems, methods, and apparatus related to the growth of single crystal III-V semiconductors on amorphous substrates. In one aspect, a shape of a semiconductor structure to be formed on an amorphous substrate is defined in a resist disposed on the amorphous substrate. A boron group element is deposited over the amorphous substrate. A ceramic material is deposited on the boron group element. The resist is removed from the amorphous substrate. The ceramic material is deposited to cover the boron group element. The amorphous substrate and materials deposited thereon are heated in the presence of a gas includingmore » « less
Full Text Available
Generation and enhancement of surface acoustic waves on a highly doped p-type III-V semiconductor substrate

Patent Dong, Boqun; Zaghloul, Mona

A device employing the generation and enhancement of surface acoustic waves on a highly doped p-type III-V semiconductor substrate (e.g., GaAs, GaSb, InAs, or InGaAs). The device includes two SiO₂/ZnO islands, each including a SiO₂ buffer layer deposited on the doped p-type III-V semiconductor substrate and a ZnO layer deposited on the SiO₂ buffer layer. An input interdigital transducers (IDT) and an output IDT are each patterned on one of the SiO₂/ZnO islands. The IDTs generates surface acoustic waves along an exposed surface of the highly doped p-type III-V semiconductor substrate. The surface acoustic waves improve the photoelectric and photovoltaicmore » « less
Full Text Available
Annealed nanostructured thin film catalyst

Patent Debe, Mark K.; Smithson, Robert L. W.; Studiner, IV, Charles J.; ...

This disclosure provides methods of making an enhanced activity nanostructured thin film catalyst by radiation annealing, typically laser annealing, typically under inert atmosphere. Typically the inert gas has a residual oxygen level of 100 ppm. Typically the irradiation has an incident energy fluence of at least 30 mJ/mm2. In some embodiments, the radiation annealing is accomplished by laser annealing. In some embodiments, the nanostructured thin film catalyst is provided on a continuous web.
Full Text Available

Similar Records

Title: Nanostructured substrates for improved lift-off of III-V thin films

Abstract

Citation Formats

Laterally varying II-VI alloys and uses thereof patent, March 2017

Multi-bandgap semiconductor structures and methods for using them patent, February 2016

Nanostructure, Photovoltaic Device, and Method of Fabrication Thereof patent-application, August 2012

Laterally Arranged Multiple-Bandgap Solar Cells patent-application, December 2012

Method for Producing a Thin Single Crystal Silicon Having Large Surface Area patent-application, June 2013

Nanopillar Photonic Crystal Lasers patent-application, September 2014

Two-Dimensional Photonic Bandgap Structures for Ultrahigh-Sensitivity Biosensing patent-application, November 2010

Solar Cell patent-application, June 2014

Nanowire Array Structures for Sensing, Solar Cell and Other Applications patent-application, December 2012

Methods of Providing Semiconductor Devices and Semiconductor Devices Thereof patent-application, March 2018

Mass Production Method of Loading Radioisotopes into Radiovoltaics patent-application, February 2017

Heterojunction Wire Array Solar Cells patent-application, August 2012

Nanoshape Patterning Techniques that Allow High-Speed and Low-Cost Fabrication of Nanoshape Structures patent-application, April 2016

Multi-Structure Pore Membrane and Pixel Structure patent-application, May 2014

Methods for Sample Characterization patent-application, December 2017

Superhydrophobic and Superoleophobic Nanosurfaces patent-application, January 2014

Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements patent-application, December 2013

Laterally varying II-VI alloys and uses thereof
patent, March 2017

Multi-bandgap semiconductor structures and methods for using them
patent, February 2016

Nanostructure, Photovoltaic Device, and Method of Fabrication Thereof
patent-application, August 2012

Laterally Arranged Multiple-Bandgap Solar Cells
patent-application, December 2012

Method for Producing a Thin Single Crystal Silicon Having Large Surface Area
patent-application, June 2013

Nanopillar Photonic Crystal Lasers
patent-application, September 2014

Two-Dimensional Photonic Bandgap Structures for Ultrahigh-Sensitivity Biosensing
patent-application, November 2010

Solar Cell
patent-application, June 2014

Nanowire Array Structures for Sensing, Solar Cell and Other Applications
patent-application, December 2012

Methods of Providing Semiconductor Devices and Semiconductor Devices Thereof
patent-application, March 2018

Mass Production Method of Loading Radioisotopes into Radiovoltaics
patent-application, February 2017

Heterojunction Wire Array Solar Cells
patent-application, August 2012

Nanoshape Patterning Techniques that Allow High-Speed and Low-Cost Fabrication of Nanoshape Structures
patent-application, April 2016

Multi-Structure Pore Membrane and Pixel Structure
patent-application, May 2014

Methods for Sample Characterization
patent-application, December 2017

Superhydrophobic and Superoleophobic Nanosurfaces
patent-application, January 2014

Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements
patent-application, December 2013