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Title: Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers

Abstract

The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.

Inventors:
; ; ;
Issue Date:
Research Org.:
Harvard Univ., Cambridge, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1531567
Patent Number(s):
7435353
Application Number:
11/008,402
Assignee:
President and Fellows of Harvard College (Cambridge, MA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
DOE Contract Number:  
FG02-01ER45922
Resource Type:
Patent
Resource Relation:
Patent File Date: 2004-12-09
Country of Publication:
United States
Language:
English

Citation Formats

Golovchenko, Jene A., King, Gavin M., Schrmann, Gregor M., and Branton, Daniel. Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers. United States: N. p., 2008. Web.
Golovchenko, Jene A., King, Gavin M., Schrmann, Gregor M., & Branton, Daniel. Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers. United States.
Golovchenko, Jene A., King, Gavin M., Schrmann, Gregor M., and Branton, Daniel. Tue . "Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers". United States. https://www.osti.gov/servlets/purl/1531567.
@article{osti_1531567,
title = {Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers},
author = {Golovchenko, Jene A. and King, Gavin M. and Schrmann, Gregor M. and Branton, Daniel},
abstractNote = {The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions. The structure can then be processed, with at least a portion of the patterned solid condensate layer on the structure surface, and then the solid condensate layer removed. Further there can be stimulated localized reaction between the solid condensate layer and the structure by directing a beam of energy at at least one selected region of the condensate layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2008},
month = {10}
}

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    Electron beam processing with condensed ice
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