Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers
Abstract
The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions, exposing the structure at the selected regions. A material layer is then deposited on top of the solid condensate layer and the exposed structure at the selected regions. Then the solid condensate layer and regions of the material layer that were deposited on the solid condensate layer are removed, leaving a patterned material layer on the structure.
- Inventors:
- Issue Date:
- Research Org.:
- Harvard Univ., Cambridge, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1531586
- Patent Number(s):
- 7524431
- Application Number:
- 11/008,438
- Assignee:
- President and Fellows of Harvard College (Cambridge, MA)
- Patent Classifications (CPCs):
-
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- FG02-01ER45922
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2004-12-09
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 36 MATERIALS SCIENCE
Citation Formats
Branton, Daniel, Golovchenko, Jene A., King, Gavin M., MoberlyChan, Warren J., and Schrmann, Gregor M. Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers. United States: N. p., 2009.
Web.
Branton, Daniel, Golovchenko, Jene A., King, Gavin M., MoberlyChan, Warren J., & Schrmann, Gregor M. Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers. United States.
Branton, Daniel, Golovchenko, Jene A., King, Gavin M., MoberlyChan, Warren J., and Schrmann, Gregor M. Tue .
"Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers". United States. https://www.osti.gov/servlets/purl/1531586.
@article{osti_1531586,
title = {Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers},
author = {Branton, Daniel and Golovchenko, Jene A. and King, Gavin M. and MoberlyChan, Warren J. and Schrmann, Gregor M.},
abstractNote = {The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energy at the selected regions, exposing the structure at the selected regions. A material layer is then deposited on top of the solid condensate layer and the exposed structure at the selected regions. Then the solid condensate layer and regions of the material layer that were deposited on the solid condensate layer are removed, leaving a patterned material layer on the structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {4}
}
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