Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers

Branton, Daniel; Golovchenko, Jene A.; King, Gavin M; MoberlyChan, Warren J; Schurmann, Gregor M

Advanced Search OptionsAdvanced Search queries use a traditional Term Search. For more info, see our FAQ.

All Fields:

Patent Title:

Abstract:

Assignee:

Inventor(s):

Patent Number:

Patent Classification (CPC):

All Classifications
A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
A43 - footwear
A44 - haberdashery
A45 - hand or travelling articles
A46 - brushware
A47 - furniture
A61 - medical or veterinary science
A62 - life-saving
A63 - sports
A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
B07 - separating solids from solids
B08 - cleaning
B09 - disposal of solid waste
B21 - mechanical metal-working without essentially removing material
B22 - casting
B23 - machine tools
B24 - grinding
B25 - hand tools
B26 - hand cutting tools
B27 - working or preserving wood or similar material
B28 - working cement, clay, or stone
B29 - working of plastics
B30 - presses
B31 - making articles of paper, cardboard or material worked in a manner analogous to paper
B32 - layered products
B33 - additive manufacturing technology
B41 - printing
B42 - bookbinding
B43 - writing or drawing implements
B44 - decorative arts
B60 - vehicles in general
B61 - railways
B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
B64 - aircraft
B65 - conveying
B66 - hoisting
B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
B81 - microstructural technology
B82 - nanotechnology
B99 - subject matter not otherwise provided for in this section
C - chemistry
C01 - inorganic chemistry
C02 - treatment of water, waste water, sewage, or sludge
C03 - glass
C04 - cements
C05 - fertilisers
C06 - explosives
C07 - organic chemistry
C08 - organic macromolecular compounds
C09 - dyes
C10 - petroleum, gas or coke industries
C11 - animal or vegetable oils, fats, fatty substances or waxes
C12 - biochemistry
C13 - sugar industry
C14 - skins
C21 - metallurgy of iron
C22 - metallurgy
C23 - coating metallic material
C25 - electrolytic or electrophoretic processes
C30 - crystal growth
C40 - combinatorial technology
C99 - subject matter not otherwise provided for in this section
D - textiles
D01 - natural or man-made threads or fibres
D02 - yarns
D03 - weaving
D04 - braiding
D05 - sewing
D06 - treatment of textiles or the like
D07 - ropes
D10 - indexing scheme associated with sublasses of section d, relating to textiles
D21 - paper-making
D99 - subject matter not otherwise provided for in this section
E - fixed constructions
E01 - construction of roads, railways, or bridges
E02 - hydraulic engineering
E03 - water supply
E04 - building
E05 - locks
E06 - doors, windows, shutters, or roller blinds in general
E21 - earth drilling
E99 - subject matter not otherwise provided for in this section
F - mechanical engineering
F01 - machines or engines in general
F02 - combustion engines
F03 - machines or engines for liquids
F04 - positive - displacement machines for liquids
F05 - indexing schemes relating to engines or pumps in various subclasses of classes f01-f04
F15 - fluid-pressure actuators
F16 - engineering elements and units
F17 - storing or distributing gases or liquids
F21 - lighting
F22 - steam generation
F23 - combustion apparatus
F24 - heating
F25 - refrigeration or cooling
F26 - drying
F27 - furnaces
F28 - heat exchange in general
F41 - weapons
F42 - ammunition
F99 - subject matter not otherwise provided for in this section
G - physics
G01 - measuring
G02 - optics
G03 - photography
G04 - horology
G05 - controlling
G06 - computing
G07 - checking-devices
G08 - signalling
G09 - education
G10 - musical instruments
G11 - information storage
G12 - instrument details
G16 - information and communication technology [ict] specially adapted for specific application fields
G21 - nuclear physics
G99 - subject matter not otherwise provided for in this section
H - electricity
H01 - basic electric elements
H02 - generation
H03 - basic electronic circuitry
H04 - electric communication technique
H05 - electric techniques not otherwise provided for
H99 - subject matter not otherwise provided for in this section
Y - new / cross sectional technologies
Y02 - technologies or applications for mitigation or adaptation against climate change
Y04 - information or communication technologies having an impact on other technology areas
Y10 - technical subjects covered by former uspc

More Options ...

Title: Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers

Abstract

The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing an ion beam at the selected regions, exposing the structure at the selected regions. A material layer is then deposited on top of the solid condensate layer and the exposed structure at the selected regions. Then the solid condensate layer and regions of the material layer that were deposited on the solid condensate layer are removed, leaving a patterned material layer on the structure.

Inventors:: Branton, Daniel; Golovchenko, Jene A.; King, Gavin M; MoberlyChan, Warren J; Schurmann, Gregor M

Issue Date:: Tue Jul 17 00:00:00 EDT 2012

Research Org.:: Harvard Univ., Cambridge, MA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1531744

Patent Number(s):: 8221595

Application Number:: 12/381,502

Assignee:: President and Fellows of Harvard College (Cambridge, MA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

Show more

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y10/00 - Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C14/541 - {Heating or cooling of the substrates}
C23C14/5873 - {Removal of material}

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/0331 - {for lift-off processes}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S977/856 - including etching/cutting
Y10S977/857 - including coating
Y10S977/888 - Shaping or removal of materials, e.g. etching
Y10S977/89 - Deposition of materials, e.g. coating, cvd, or ald
Y10S977/891 - Vapor phase deposition

Show less

DOE Contract Number:: FG02-01ER45922

Resource Type:: Patent

Resource Relation:: Patent File Date: 2009-03-12

Country of Publication:: United States

Language:: English

Citation Formats


                    Branton, Daniel, Golovchenko, Jene A., King, Gavin M, MoberlyChan, Warren J, and Schurmann, Gregor M. Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers.  United States: N. p., 2012. 
        Web.

Copy to clipboard


                    Branton, Daniel, Golovchenko, Jene A., King, Gavin M, MoberlyChan, Warren J, & Schurmann, Gregor M. Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers.  United States.

Copy to clipboard


                    Branton, Daniel, Golovchenko, Jene A., King, Gavin M, MoberlyChan, Warren J, and Schurmann, Gregor M. Tue .  
        "Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers".  United States.  https://www.osti.gov/servlets/purl/1531744.

Copy to clipboard


                    
@article{osti_1531744,

  title        = {Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers},

  author       = {Branton, Daniel and Golovchenko, Jene A. and King, Gavin M and MoberlyChan, Warren J and Schurmann, Gregor M},

  abstractNote = {The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing an ion beam at the selected regions, exposing the structure at the selected regions. A material layer is then deposited on top of the solid condensate layer and the exposed structure at the selected regions. Then the solid condensate layer and regions of the material layer that were deposited on the solid condensate layer are removed, leaving a patterned material layer on the structure.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Jul 17 00:00:00 EDT 2012},

  month        = {Tue Jul 17 00:00:00 EDT 2012}

}

Copy to clipboard

Patent:

Save / Share:

Export Metadata

Save to My Library

Works referenced in this record:

"Sputtering" of Ice by MeV Light Ions
journal, April 1978

Brown, W. L.; Lanzerotti, L. J.; Poate, J. M.
Physical Review Letters, Vol. 40, Issue 15
https://doi.org/10.1103/PhysRevLett.40.1027

Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
patent, August 2011

Golovchenko, Jene A.; King, Gavin M.; Schurmann, Gregor M.
US Patent Document 7,993,538
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7993538

Linear and Nonlinear Processes in the Erosion of $H_{2}$ O Ice by Fast Light Ions
journal, November 1980

Brown, W. L.; Augustyniak, W. M.; Lanzerotti, L. J.
Physical Review Letters, Vol. 45, Issue 20
https://doi.org/10.1103/PhysRevLett.45.1632

Growth of Dielectric Thin Films by Irradiation of Condensed Molecular Precursors with Synchrotron Radiation
journal, January 1992

Strongin, D. R.; Moore, J. F.; Ruckman, M. W.
MRS Proceedings, Vol. 282
https://doi.org/10.1557/PROC-282-631

Dry process for the production of microelectronic devices
patent, September 1982

Okumura, Koji; Saeva, Franklin D.
US Patent Document 4,348,473
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4348473

Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers
patent, April 2009

Branton, Daniel; Golovchenko, Jene A.; King, Gavin M.
US Patent Document 7,524,431
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7524431

Supercooled and glassy water
journal, October 2003

Debenedetti, Pablo G.
Journal of Physics: Condensed Matter, Vol. 15, Issue 45
https://doi.org/10.1088/0953-8984/15/45/R01

Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface
patent, July 2007

Koops, Hans; Edinger, Klaus
US Patent Document 7,238,294
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7238294

Novolak resin blends for photoresist applications
patent, December 1994

Lynch, Thomas J.; Sobodacha, Chester J.; Durham, Dana L.
US Patent Document 5,374,693
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5374693

Dry etching method
patent, March 1993

Shinohara, Keiji
US Patent Document 5,194,118
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5194118

Thickness dependent crystallization kinetics of sub-micron amorphous solid water films
journal, March 2003

Safarik, D. J.; Meyer, R. J.; Mullins, C. B.
The Journal of Chemical Physics, Vol. 118, Issue 10
https://doi.org/10.1063/1.1543980

Amorphous Water
journal, June 2004

Angell, C. Austen
Annual Review of Physical Chemistry, Vol. 55, Issue 1
https://doi.org/10.1146/annurev.physchem.55.091602.094156

Process for fabricating cryogenic targets and targets made thereby
patent, August 1985

Whitlock, Robert R.
US Patent Document 4,535,023
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4535023

Three dimensional imaging system
patent, January 2000

Wohlstadter, Jacob N.
US Patent Document 6,014,259
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/6014259

Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
patent, October 2008

Golovchenko, Jene A.; King, Gavin M.; Schurmann, Gregor M.
US Patent Document 7,435,353
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7435353

Nanolithography using field emission and conventional thermionic electron sources
journal, April 1989

Devenish, R. W.; Eaglesham, D. J.; Maher, D. M.
Ultramicroscopy, Vol. 28, Issue 1-4
https://doi.org/10.1016/0304-3991(89)90318-5